2013
DOI: 10.1109/tmech.2011.2163200
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A Monolithic Compliant Piezoelectric-Driven Microgripper: Design, Modeling, and Testing

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Cited by 183 publications
(93 citation statements)
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“…Piezoelectric (PZT) motors are providing viable implementation alternatives for a growing number of applications especially in medical applications (MRI compatible devices, micro-dose dispensing, cell penetration and cell imaging in cytopathology, drug delivery devices, 3D scanning) optics, measurement etc. because of inherent advantages for equipment design (47)- (51) . Special attention are attracting PZT motors which can provide unlimited motion and very high accuracy.…”
Section: New Pzt Actuatorsmentioning
confidence: 99%
“…Piezoelectric (PZT) motors are providing viable implementation alternatives for a growing number of applications especially in medical applications (MRI compatible devices, micro-dose dispensing, cell penetration and cell imaging in cytopathology, drug delivery devices, 3D scanning) optics, measurement etc. because of inherent advantages for equipment design (47)- (51) . Special attention are attracting PZT motors which can provide unlimited motion and very high accuracy.…”
Section: New Pzt Actuatorsmentioning
confidence: 99%
“…The integrations of piezoelectric actuators (PEAs) and flexure-based mechanisms have been widely utilized in nano-positioning and manipulations [1][2][3][4][5]. On the one hand, the shape of a PEA changes if charge or voltage is exerted, and thus generating sub-nanometer resolution actuation.…”
Section: Introductionmentioning
confidence: 99%
“…Over the past several decades, as one of the best solutions for the micro/nano operating problems in industry, such as nano-imprint, cell operation, scanning probe microscopes, high density data recording, optical instruments, measurement systems and micro/nano manipulations [1][2][3][4][5][6][7], a precision positioning system usually possesses a number of advantages such as high positioning accuracy, fast response speed, appropriate workspace, satisfactory stability and dynamic characteristics [8,9].It is mainly composed of three parts,namely, the actuation unit, guide mechanism and end-effector. The piezoelectric actuator (PEA) is the main type of actuator which is often used to drivea positioning mechanismbecause it offers the extremely fine resolution, quick response, large force generation, high electrical-mechanical power conversion efficiency and small volume.…”
Section: Introductionmentioning
confidence: 99%