A Multi-Channel Gas Sensor Using Fabry-Perot Interferometer-Based Infrared Spectrometer

Abstract

This is an Open Access article distributed under the terms of the Creative Commons Attribution Non-Commercial License(http://creativecommons.org/licenses/bync/3.0)which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.Journal of Sensor Science and Technology Vol. 21, No. 6 (2012) AbstractWe report a Fabry-Perot interferometer (FPI)-based multi-channel micro-spectrometer used for multi-gas measurement in the spectral range of 3-5 Ïm and its gas sensing performance. The fabricated infrared (IR) spectrometer consists of two parts: an FPI on the top side for selective IR filtering and a V 2 O 5 -based IR detector array on the bottom side for the detection of the filtered IR. Experimental results show that the FPI-based multi-channel gas sensor has reliability and selectivity for simultaneously detecting environmentally harmful gases such as CH 4 , CO 2 , N 2 O and CO in the spectral range of 3-5 Ïm. The fabricated FPI-based multi-channel gas sensor also demonstrated that a reliable and selective detection of gas concentrations ranging from 0 to 500 ppm is feasible. In addition, the electrical characteristics demonstrate a superior response performance in regards to the selectivity in the multi-target gases.

Three-gas detection system with IR optical sensor based on NDIR technology

“…Yet, it is feasible in the gas concentration from 0 to 500 ppm [9], which may hardly be applied in some occasions, where higher concentration detection is needed, such as coal mine gas detection.…”

Addressed Combined Fiber-Optic Sensors as Key Element of Multisensor Greenhouse Gas Monitoring Systems

“…Using the multimode interference effect (MMI) [6,7] is a promising method of FOS creation. The FOSs based on the MMI principle are convenient because their architecture is simple, and they are easy to manufacture and compact.…”