A multi-layer biochip with integrated hollow waveguides

Spicer, D. F.; McMullin, J.N.; Rourke, H.N.

doi:10.1088/0960-1317/16/8/032

Cited by 8 publications

(5 citation statements)

References 34 publications

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“…Anisotropic silicon etching has been also utilized to form metalized silicon waveguide grooves capped by metal strips. In this application, optical coupling between the waveguides and microchannels is achieved by reflection from the end-facets of the waveguides [49]. Many these methods, however, require complex and lengthy fabrication process, and often the materials are not well-suited for biological applications or for visible light.…”

Section: The Optical Systemmentioning

confidence: 99%

Microfluidics and photonics for Bio‐System‐on‐a‐Chip: A review of advancements in technology towards a microfluidic flow cytometry chip

Godin

Chen

Cho

et al. 2008

Journal of Biophotonics

150

106

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Microfluidics and photonics come together to form a field commonly referred to as ‘optofluidics’. Flow cytometry provides the field with a technology base from which both microfluidic and photonic components be developed and integrated into a useful device. This article reviews some of the more recent developments to familiarize a reader with the current state of the technologies and also highlights the requirements of the device and how researchers are working to meet these needs. A microfluidic flow cytometer protoype employing on-chip lenses for illumination and light collection in conjunction with a microfluidic sample flow system for device miniaturization.

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Section: The Optical Systemmentioning

confidence: 99%

Microfluidics and photonics for Bio‐System‐on‐a‐Chip: A review of advancements in technology towards a microfluidic flow cytometry chip

Godin

Chen

Cho

et al. 2008

Journal of Biophotonics

150

106

View full text Add to dashboard Cite

show abstract

“…Typically, a planar LOC with integrated optics consists of a central core layer that contains the microchannels and waveguides and outside layers of lower refractive index that act as the upper and lower waveguide claddings. Taking advantage of the advanced micromachining and processing techniques already developed for semiconductor technology, many LOCs have been fabricated in silicon and glass [2][3][4][5][6][7]. However, polymers such as optical adhesives, SU-8 and polydimethylsiloxane (PDMS) are favoured in many 3 Author to whom any correspondence should be addressed.…”

Section: Introductionmentioning

confidence: 99%

PDMS biochips with integrated waveguides

Azmayesh-Fard

Flaim

McMullin

2010

J. Micromech. Microeng.

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A general method is described for the fabrication of polydimethylsiloxane (PDMS) lab-on-a-chip (LOC) devices with integrated optic and fluidic elements. The PDMS core layer containing the optic and fluidic components is cast and cured under pressure on a silicon master. Subsequently, outer layers of lower-index PDMS are bonded to the core layer to provide optical and fluidic confinement. The functionality of the waveguides and microchannels is demonstrated by the detection and identification of two different types of fluorescent polystyrene beads in a pressure-driven flow inside a microfluidic channel in a device fabricated by this process.

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“…Waveguides for LOC applications have been previously fabricated through oxide deposition, [11][12][13] ion-exchange 14,15 and anisotropic etching of silicon. 16 However, waveguide systems made of polymers such as SU-8, [17][18][19][20] UV-laser-written optical adhesives 21 and poly(dimethylsiloxane) (PDMS) 10,[22][23][24] have grown in popularity due to the low cost of these materials and the rapid fabrication processes based upon them.…”

Section: Introductionmentioning

confidence: 99%

Rapid fabrication of a microfluidic device with integrated optical waveguides for DNA fragment analysis

2007

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The fabrication and performance of a microfluidic device with integrated liquid-core optical waveguides for laser induced fluorescence DNA fragment analysis is presented. The device was fabricated through poly(dimethylsiloxane) (PDMS) soft lithography and waveguides are formed in dedicated channels through the addition of a liquid PDMS pre-polymer of higher refractive index. Once a master has been fabricated, microfluidic chips can be produced in less than 3 h without the requirement for a cleanroom, yet this method provides an optical system that has higher performance than a conventional confocal optical assembly. Optical coupling was achieved through the insertion of optical fibers into fiber-to-waveguide couplers at the edge of the chip and the liquid-fiber interface results in low reflection and scattering losses. Waveguide propagation losses are measured to be 1.8 dB cm(-1) (532 nm) and 1.0 dB cm(-1) (633 nm). The chip displays an average total coupling loss of 7.6 dB due to losses at the optical fiber interfaces. In the electrophoretic separation and detection of a BK virus PCR product, the waveguide system achieves an average signal-to-noise ratio of 570 +/- 30 whereas a commercial confocal benchtop electrophoresis system achieves an average SNR of 330 +/- 30. To our knowledge, this is the first time that a waveguide-based system has been demonstrated to have a SNR comparable to a commercially available confocal-based system for microchip capillary electrophoresis.

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A multi-layer biochip with integrated hollow waveguides

Cited by 8 publications

References 34 publications

Microfluidics and photonics for Bio‐System‐on‐a‐Chip: A review of advancements in technology towards a microfluidic flow cytometry chip

Microfluidics and photonics for Bio‐System‐on‐a‐Chip: A review of advancements in technology towards a microfluidic flow cytometry chip

PDMS biochips with integrated waveguides

Rapid fabrication of a microfluidic device with integrated optical waveguides for DNA fragment analysis

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