A Multi-Process Microfabrication Simulatorb on Cellular Automata

Abstract

We describe a 3D simulator for several fabrication techniques utilized to create MEMS. The software is based on a cellular automata model and allows the user to simulate several processes, such as anisotropic wet etching in alkaline solutions and DRIE on (100) oriented Si substrates. The simulator allows for arbitrarily shaped masking materials and several processes can be applied in sequence to the same substrate. This enables the software to simulate the fabrication of MEMS devices which require more than one etching step. Although the automata used are not the most complex available, many of the results shown here are still acceptable from an engineering point of view.

Simulation of PECVD SiO2 Deposition Using a Cellular Automata Approach

“…The current work is a continuation of previous researches with simulators developed using the same cellular automata approach (6), focusing now on the deposition of a SiO 2 film by PECVD. In order to do this, we utilize the cellular deposition algorithm proposed by Strasser and Selberherr and described in reference (5).…”