2015
DOI: 10.1039/c4lc01321b
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A multichannel neural probe with embedded microfluidic channels for simultaneous in vivo neural recording and drug delivery

Abstract: Multi-functional neural probes integrated with various stimulation modalities are becoming essential tools in neuroscience to study the brain more effectively. In this paper, we present a new multi-functional neural probe that allows chemical stimulation through drug delivery and simultaneous recording of individual neuron signals through a microelectrode array. By embedding microchannels in silicon using a proposed glass reflow process, we successfully fabricated 40 μm thick silicon neural probes suitable for… Show more

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Cited by 82 publications
(77 citation statements)
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“…Early advances in this sense relied on fabrication schemes known from MEMS technology and wafer bonding to develop silicon probes with microfluidic channels ( 230 ). These approaches have been translated to, for example, SU-8, parylene, and elastomeric probes ( 58 , 231 , 232 ).…”
Section: Combining Modalitiesmentioning
confidence: 99%
“…Early advances in this sense relied on fabrication schemes known from MEMS technology and wafer bonding to develop silicon probes with microfluidic channels ( 230 ). These approaches have been translated to, for example, SU-8, parylene, and elastomeric probes ( 58 , 231 , 232 ).…”
Section: Combining Modalitiesmentioning
confidence: 99%
“…1) was fabricated based on four major steps: 1) etching the cavities and creating a glass cover to form the embedded microfluidic channels in the silicon substrate, 2) patterning of a microelectrode array on top, 3) patterning an inlet and an outlet to provide an interface to the microfluidic channels, and 4) releasing the structure from the backside to create the final shape. 11 Design, fabrication, and packaging of 3-inlet SHM To achieve multi-drug delivery with our chemtrode, we designed and fabricated a SHM in a 3-inlet polydimethylsiloxane (PDMS) microfluidic chip (Fig. To improve the process yield during this step, multiple narrow cavities are first created to prevent the glass from completely filling the cavities (see the cross-section of the chemtrode shank in Fig.…”
Section: Fabrication Of Chemtrodementioning
confidence: 99%
“…When infusing various concentrations of TTX, we observed a decrease in the firing rates of the four sorted neural spike signals. 11 In addition, since neural probe systems are implanted directly above mouse heads, the size of the total system is critical for long- term chronic in vivo experiments. S5).…”
Section: In Vivo Neural Modulation Through Direct Brain Infusion Of Vmentioning
confidence: 99%
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“…Changes in the response properties of isolated neurons during drug delivery confirmed the validity of this approach. Since then, efforts have been devised toward precisely control and monitor fluid movements (Lin and Pisano, 1999;McAllister et al, 2000;Rathnasingham et al, 2004;Neeves et al, 2006;Papageorgiou et al, 2006;Foley et al, 2009;Rohatgi et al, 2009;Pongrácz et al, 2013;Lee et al, 2015). Recently, multi-shank fluidic silicon probes have been developed for neuroscientific applications (Seidl et al, 2010;Frey et al, 2011;John et al, 2011;Spieth et al, 2011).…”
Section: Introductionmentioning
confidence: 99%