2004
DOI: 10.1016/j.snb.2003.10.009
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A neural probe process enabling variable electrode configurations

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Cited by 45 publications
(26 citation statements)
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“…SOI-based probes with integrated microfluidic channels have also been presented (Cheung et al, 2003), permitting highly localized injection of neurotransmitters or other drugs. In a departure from using fixed photolithographic mask sets, direct write laser (DWL) lithography has been used to process SOI wafers with semi-custom designs, by defining which final electrodes out of a standardized array will be active (Kindlundh et al, 2004).…”
Section: Other Silicon-based Arraysmentioning
confidence: 99%
“…SOI-based probes with integrated microfluidic channels have also been presented (Cheung et al, 2003), permitting highly localized injection of neurotransmitters or other drugs. In a departure from using fixed photolithographic mask sets, direct write laser (DWL) lithography has been used to process SOI wafers with semi-custom designs, by defining which final electrodes out of a standardized array will be active (Kindlundh et al, 2004).…”
Section: Other Silicon-based Arraysmentioning
confidence: 99%
“…In the future, devices for the treatment of neurodegenerative diseases, including Parkinson's disease, epilepsy, and depression, may employ microelectrodes. Batch-processed microelectrodes have been developed using a variety of substrates, including silicon [1], [2], silicon-on-insulator [3], ceramic [4], and metal [5]. Despite these advances, there has been limited progress in demonstrating chronically-implantable systems that can continue to function for many months.…”
Section: Introductionmentioning
confidence: 99%
“…For example, to enable single-unit recordings in structures with dense cell body layer, such as neocortex and hippocampus, recording sites span 140 μ m in depth with each electrode separated by a pitch of 20 μ m [32]. Sizing the electrode area has a tradeoff between low impedance, high probability of coming into proximity of an active neuron (large recording area) and the ability to distinguish single-unit activity (small recording area) [33]. We have designed each electrode with an area of 143 μ m 2 to achieve low impedance and to record from dense populations of individual neurons (soma diameter 10–20 μ m) in the neocortex and hippocampus.…”
Section: Resultsmentioning
confidence: 99%