A new approach for the design of low velocity coupling for ring shape anchored contour mode disk resonators

Bandwidth controlled weakly connected MEMS resonators based narrowband filter

“…According to the concept developed in [34, 37], for the low‐velocity coupling through the anchor, since the coupler is a flexural beam resonator (see Fig. 5), its stiffness could be calculated from where E c and ρ c are the overall Young modulus and density of the structural material of the coupler beam and all the dimensional parameters are given in Fig.…”

“…Since the coupling location of the resonator in this design is supposed to be the resonator's anchor stem, its stiffness is critical in the determination of the filter's bandwidth. As estimated in [34], anchor stem could be considered as a longitudinal mode beam resonator with the overall stiffness of where A rc and l rc are anchor stem area and length, respectively, presented in Fig. 6.…”

“…Since those techniques challenge the symmetry of the radial contour mode of the device, they will result in higher energy loss and therefore lower Q . A more sophisticated low‐velocity coupling method has been developed by Baghelani et al [34], where the segments of the anchor of two ring shape anchored radial contour mode hollow disk resonators are considered as the coupling locations of resonators. In that case, the resonator will remain untouched and its mode shape is completely preserved.…”

“…In this paper, we will present a novel technique for tuneable coupling of contour mode disk resonators. The utilised low‐velocity coupling method is based on our previously presented design [34] for the coupling of radial contour mode disk resonators through their anchor segments. In the presented method, an AlN flexural mode piezoelectric beam is attached between two electrostatically driven and sensed resonators.…”

Crossed ring anchored disk resonator for self-alignment of the anchor

“…Spurious modes of this structure are also suppressed by both electrical and mechanical techniques [20–22] . Also, low velocity coupling method could be employed for constructing narrow band mechanical filters for direct channel selection filters [23] . Another important challenge in all MEMS devices, especially in RF MEMS resonators due to their symmetric resonance features, is misalignment of different layers and parts in the fabrication process.…”