1995
DOI: 10.1063/1.115172
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A new concept for the design and realization of metal based single electron devices: Step edge cut-off

Abstract: To increase the operating temperature of a single electron circuit, it is necessary to reduce the capacitance of the tunnel junction. Usually this is done by reducing the linewidth of the capacitor forming metal stripes, which are sandwiched with an intermediate insulator. The use of alternative materials, however, allows capacitance reduction by means of thicker isolation layers or by a capacitor geometry different from a sandwich. The new SECO (step edge cut off) method, for the fabrication of single electro… Show more

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Cited by 23 publications
(8 citation statements)
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“…21,22,32 In two of those works attempts are made to characterize the tunnel properties of Cr/CrO x /Cr junctions, but the CrO x barrier formation was achieved by in situ oxidation 21 or direct CrO x evaporation, 22 which is quite different from our process in which the barrier was formed in air under ambient conditions. In both cases, the junctions were characterized by fitting of the Simmons model for the tunneling current to the measured current-voltage characteristics (IVCs).…”
Section: Characterization Of Cr/cro X /Cr Tunnel Junctionsmentioning
confidence: 99%
See 1 more Smart Citation
“…21,22,32 In two of those works attempts are made to characterize the tunnel properties of Cr/CrO x /Cr junctions, but the CrO x barrier formation was achieved by in situ oxidation 21 or direct CrO x evaporation, 22 which is quite different from our process in which the barrier was formed in air under ambient conditions. In both cases, the junctions were characterized by fitting of the Simmons model for the tunneling current to the measured current-voltage characteristics (IVCs).…”
Section: Characterization Of Cr/cro X /Cr Tunnel Junctionsmentioning
confidence: 99%
“…Therefore, the development and improvement of EBL techniques is very important for the future development of SET applications. Diverse fabrication techniques based on EBL have been established, 9,10 but the EBL variants based on the shadow evaporation method still represent the world-wide standard for the fabrication of SET circuits. This method allows the in situ fabrication of small, high-quality tunnel junctions using only one resist mask.…”
Section: Introductionmentioning
confidence: 99%
“…If such a metallic island (or a series of such islands) is sandwiched between two physically close metallic electrodes (the source and the drain), we have a device which, in principle, is capable of handling one electron charge at a time [281][282][283]. In practice, the self-capacitance of the metal island is negligible compared to its capacitive coupling to the adjacent electrodes and this latter defines the island capacitance for practical purposes.…”
Section: Single-electron Devicesmentioning
confidence: 99%
“…As a representative example, Hirose et al determined the energy barrier between E F of gold and the LUMO of PTCDA, the parent compound of PTCDI-SC5, to be about 0.5 eV [40]. On the other hand, the barrier height for Al/Al 2 O 3 is considerably larger, i.e., in the range of 2.0-2.5 eV [41].…”
Section: I/v Curves With Regular Current Steps: Coulomb Staircasesmentioning
confidence: 99%