A New Design of an MOEMS Gyroscope Based on a WGM Microdisk Resonator

Abstract

In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS) gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS resonator. The mechanical characteristics, frequency split, and quality factor (Q) of the MEMS resonator; the optical characteristics, Q value, and coupling regimes of the WGM resonator; and the coupling between the two resonators were analyzed. Its operation principle—the transformation process from angular velocity to the resonance wavelength of the WGM resonator—is presented at same time. Next, the analysis conclusions were validated with the help of simulations in ANSYS and FDTD (Finite-Difference Time-Domain) Solutions. Afterwards, some key specifications were estimated based on the results of simulations. Lastly, the fabrication process is detailed.

MEMS and MOEMS Gyroscopes: A Review

“…Moreover, based on the MOEMS techniques, in 2020, D. Xia et al [114][115][116] reported an electrostatically driven MEMS gyroscope with the nested ring structure and detected by the whispering gallery mode (WGM) mode, as shown in Fig. 8(d).…”

Development and analysis of whispering gallery mode model for refractive index sensing

“…The broadband sensor was siliconbased [11]. A WGM gyroscope was shown to have a 3.002 pm/(°.s -1 ) [12]. Dual measurements of refractive index changes and pressure were conducted using a WGM resonator.…”

The Measurement of Nanoparticle Concentrations by the Method of Microcavity Mode Broadening Rate

“…In addition, the refractive index of the environment [ 16 ], temperature [ 17 , 18 , 19 ], humidity [ 20 ], greenhouse gases [ 21 ] and deformation [ 22 ] can be measured by these kinds of sensors. In addition, the microcavities can be used as a gyroscope [ 23 ]. Using microcavities, it is also possible to create stable compact narrow-band laser systems [ 24 , 25 ] and to generate optical frequency combs [ 26 ] including soliton ones [ 27 ].…”