1996
DOI: 10.1109/22.506451
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A new miniature magnetic field probe for measuring three-dimensional fields in planar high-frequency circuits

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Cited by 85 publications
(5 citation statements)
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“…However, the vessel thickness of the alkali metal gas, the strict temperature control, and the thermal diffusion motion of the gas limit the resolution of the microwave field imaging image on the surface of the device to be measured. The resolution of the microwave field on the chip surface measured using the alkali metal gas chamber only reaches 150 × 100 × 100μm 3 . SQUID microscopy is a scanning microwave magnetic field detection technique consisting of a superconducting loop with two Josephus superconducting junctions connected in parallel; 7 it has high sensitivity and spatial resolution.…”
Section: Introductionmentioning
confidence: 98%
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“…However, the vessel thickness of the alkali metal gas, the strict temperature control, and the thermal diffusion motion of the gas limit the resolution of the microwave field imaging image on the surface of the device to be measured. The resolution of the microwave field on the chip surface measured using the alkali metal gas chamber only reaches 150 × 100 × 100μm 3 . SQUID microscopy is a scanning microwave magnetic field detection technique consisting of a superconducting loop with two Josephus superconducting junctions connected in parallel; 7 it has high sensitivity and spatial resolution.…”
Section: Introductionmentioning
confidence: 98%
“…The conventional microwave field measurement techniques are mainly based on miniature magnetic probes, supercooled atoms, superconducting quantum interferometer (SQUID), and spin Hall devices. Gao et al 3 designed a small microwave magnetic probe to visualize phase and three-dimensional (3D) vector fields of microwave magnetic fields emitted from microstrip lines. However, the size of the probe limits the imaging resolution to only reaching the millimeter scale.…”
Section: Introductionmentioning
confidence: 99%
“…[2][3][4][5][6] A magnetic near-field probe consists of a single loop used for coupling a magnetic field and a transmission line structure to transmit signals. 7 When the loop couples magnetic field, the normal electric field also generates common mode (CM) signals, which reduces the accuracy of magnetic field measurement, so the design of a magnetic field probe with high CM suppression is necessarily important.…”
Section: Introductionmentioning
confidence: 99%
“…The probe is then miniaturized to a simple low‐cost loop made of a printed circuit board (PCB) without electromagnetic shielding. The disadvantage is that this type of probe cannot isolate unwanted electric field coupling . In contrast, the magnetic probes with electric shielding offer better suppression of unwanted electric field and provide a better spatial resolution when they are fabricated with multilayer thick film on silicon and glass substrates, thin film on a glass substrate and multilayer low‐temperature co‐fired ceramics .…”
Section: Introductionmentioning
confidence: 99%