1984
DOI: 10.1016/0022-0248(84)90423-8
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A new MOVPE technique for the growth of highly uniform CMT

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Cited by 221 publications
(32 citation statements)
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“…Arsenic is readily incorporated in MCT grown by atmospheric-pressure metalorganic vapor-phase epitaxy (MOVPE) using the interdiffused multilayer process (IMP) 20 and a number of parameters have been identified which enable dopant activation to a greater or lesser extent. These include the need for the dimethylcadmium (Me 2 Cd) concentration to be greater than that of the tellurium precursor during the CdTe growth cycle and postgrowth annealing schedules, including the aforementioned hightemperature and mercury vacancy-filling anneals.…”
Section: Literature Review Of Arsenic Doping In Mctmentioning
confidence: 99%
“…Arsenic is readily incorporated in MCT grown by atmospheric-pressure metalorganic vapor-phase epitaxy (MOVPE) using the interdiffused multilayer process (IMP) 20 and a number of parameters have been identified which enable dopant activation to a greater or lesser extent. These include the need for the dimethylcadmium (Me 2 Cd) concentration to be greater than that of the tellurium precursor during the CdTe growth cycle and postgrowth annealing schedules, including the aforementioned hightemperature and mercury vacancy-filling anneals.…”
Section: Literature Review Of Arsenic Doping In Mctmentioning
confidence: 99%
“…Typically, a 3-to 4-lm-thick CdTe layer was used as a buffer layer reducing stress caused by a crystal lattice misfit between a GaAs substrate and a HgCdTe epitaxial layer structure. 40 The growth was carried out at a temperature of 350°C and mercury zone at 210°C using the interdiffused multilayer process (IMP) 41,42 in a horizontal MOCVD AIX 200 reactor. Hydrogen was used as a carrier gas.…”
Section: Numerical and Experimental Resultsmentioning
confidence: 99%
“…n-type Hg 1−x Cd x Te wafers (x ≈ 0.26) used for the experiments were grown by the inter-diffused multi-layer process (IMP) metal-organic vapor phase epitaxy (MOVPE) [7]. In IMP-MOVPE, several tens of thin CdTe and HgTe layers were grown alternately and diffused to result in homogeneous HgCdTe.…”
Section: Methodsmentioning
confidence: 99%