A new procedure to seal the pores of mesoporous low-k films with precondensed organosilica oligomers

Abstract

A new strategy to seal mesoporous low-k thin films with a pore size of 3 nm has been developed. This is achieved by spin-coating of a self-assembled carbon-bridged organosilica layer followed by a grafting with hexamethyl disilazane.

Periodic Mesoporous Organosilica Functionalized with Sulfonic Acid Groups as Acid Catalyst for Glycerol Acetylation

“…Different organic bridges have been employed for very diverse applications, such as heterogeneous catalysts [7,8], bio-sensors [9,10], chromatographic packing materials [11,12], low-k materials [13,14], adsorbents of pollutants [15] and controlled drug delivery systems [16,17,18,19]. PMOs are highly porous materials with large specific surface areas, pore volumes and narrow pore size distributions.…”

“…The discovery of Periodic Mesoporous Organosilicas (PMOs) [ 1 , 2 , 3 ] with organic bridging groups incorporated in their silica framework has been the start of a fascinating research area which provides materials with huge potential [ 4 , 5 , 6 ]. Different organic bridges have been employed for very diverse applications, such as heterogeneous catalysts [ 7 , 8 ], bio-sensors [ 9 , 10 ], chromatographic packing materials [ 11 , 12 ], low-k materials [ 13 , 14 ], adsorbents of pollutants [ 15 ] and controlled drug delivery systems [ 16 , 17 , 18 , 19 ]. PMOs are highly porous materials with large specific surface areas, pore volumes and narrow pore size distributions.…”

Pore Narrowing of Mesoporous Silica Materials

“…Recently, we reported a possible pre-sealing method by depositing a non porous layer on top of a mesoporous film [ 17 ]. This method involved the molecular self-assembling of cyclic carbon-bridged organosilane precursors which allows the formation of intermediate fragments with molecular sizes exceeding pore sizes of 3 nm.…”

Catalytic Upgrading of Bio-Oil by Reacting with Olefi ns and Alcohols over Solid Acids: Reaction Paths via Model Compound Studies

“…Different organic bridges have been employed for very diverse applications, such as heterogeneous catalysts [7,8], bio-sensors [9,10], chromatographic packing materials [11,12], low-k materials [13,14], adsorbents of pollutants [15] and controlled drug delivery systems [16][17][18][19]. PMOs are highly porous materials with large specific surface areas, pore volumes and narrow pore size distributions.…”