A New Quartz Monolithic Differential Vibrating Beam Accelerometer

Traon, O. Le; Janiaud, D.; Pernice, M.; Masson, Stève; Muller, Serge; Tridera, J-Y.

doi:10.1109/plans.2006.1650581

Cited by 33 publications

(28 citation statements)

References 10 publications

(10 reference statements)

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“…Transient and phase noise simulations can be performed and compared to standard analytical expressions and experimental measurements to validate the model. The simulations presented in this section are made with the parameters of the VIA (Vibrating Integrated Accelerometer) quartz, that is based on a clamped-clamped beam resonator developed at ONERA [3] (as shown in Fig. 4 and in Table 1 …”

Section: Model Simulationmentioning

confidence: 99%

“…Simulation results are discussed and compared to analytical expressions in Sect. 3. As explained in Sect.…”

Section: Introductionmentioning

confidence: 95%

“…MEMS frequency references [1,2], and vibrating MEMS sensors such as Vibrating Beam Accelerometers (VBAs) [3][4][5] or quartz crystal microbalances [6,7] use a resonator driven at its resonance by an oscillator circuit. The output of such sensors is the oscillator frequency and their performances are limited by frequency stability and phase noise [8].…”

Section: Introductionmentioning

confidence: 99%

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Behavioural modelling of MEMS oscillators and phase noise simulation

Papin¹,

Lévy²,

Lissorgues³

et al. 2012

Analog Integr Circ Sig Process

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MEMS frequency references and MEMS vibrating sensors, based on a resonator vibrating at its resonance frequency, offer interesting prospects in terms of miniaturization, cost and precision but their design optimization is difficult because multiple physical domains must be taken into account, as well as the associated nonlinearities that limit the carrier power. Once the model is set up, the simulation of the accurate phase noise that limits the sensor's precision is also a difficult matter. In this work, a behavioural model in Verilog-A is presented, that allows multi-physic simulations : mechanical, piezoelectric, electrostatic and electrical analytic descriptions including the associated nonlinear behaviours are derived. Transient and phase noise analysis are then performed with this model through the dedicated CADENCE PSS (Periodic Steady State) and Pnoise (Periodic Noise) analysis and compared to the analytical expression of the nonlinear critical amplitude, and to the standard Leeson analytical expression for phase noise. This work is the first step to improve the performances of such MEMS oscillators.

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Section: Model Simulationmentioning

confidence: 99%

“…Simulation results are discussed and compared to analytical expressions in Sect. 3. As explained in Sect.…”

Section: Introductionmentioning

confidence: 95%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Behavioural modelling of MEMS oscillators and phase noise simulation

Papin¹,

Lévy²,

Lissorgues³

et al. 2012

Analog Integr Circ Sig Process

Self Cite

View full text Add to dashboard Cite

show abstract

“…Pivot Anchor on both sides of proofmasses. The two symmetrical proofmass A and B, attached to the corresponding DETF resonators via the lever mechanism, are used to reduce the vibration coupling resulted from the two symmetrical DETF resonators at approximate zero-acceleration loads [9]. The two-stage microlever mechanism magnifies the inertial force propagated through the proofmasses to the DETF resonators.…”

Section: Introductionmentioning

confidence: 99%

Design of a new differential silicon resonant accelerometer with dual proofmasses using two-stage microlever

Wen

Fan

et al. 2015

2015 Ieee Sensors

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A novel micromechanical silicon resonant accelerometer using a two-stage microlever and dual-proofmass architecture is presented. Based on the structural model of the accelerometer, the ANSYS simulations are performed to investigate the effects of sensitive structural parameters on the acceleration sensitivity and operating frequency of accelerometer, and the sensitivity change in response to temperature acclimation. The results show that the proposed accelerometer achieves a sensitivity of 150 Hz/g and a linear accuracy of 1.91‰ with a nominal frequency of 22482 Hz in the dynamic range of ±50 g. Moreover, in addition to doubling the sensitivity, the introduced two-proofmass structure enables to cancel the lock-in phenomenon existing in a double-ended tuning fork resonator, in contrast with a monolithic proofmass structure.

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“…On the other hand, langasite is an interesting material for microbalance in liquid media and can be operated even in heavy viscosity liquids [2]. For vibrating inertial sensors such as vibrating beam accelerometers (VBA) [3] or Coriolis vibrating gyros (CVG) [4], langasite is also an attractive piezoelectric crystal in comparison with quartz, thanks to its potential high quality factor and higher electromechanical coupling, predicting an improvement of the bias stability and the signal to noise ratio of the sensors [5]. Several application areas of MEMS can be initiated with this material [6,7].…”

Section: Introductionmentioning

confidence: 99%

Langasite resonant structure: Micromachining and characterisation

Leblois

Traon

2010

EFTF-2010 24th European Frequency and Time Forum

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This paper focuses on the micromachining of 3D microstructures on LGS plates by anisotropic wet etching. Several etching conditions are investigated to determine the best experimental way to fabricate 3D microstructures. The study covers the composition, the concentration and the temperature of the etching bath. Several types of experimental results are used to determine the conditions that provide consistent and reproducible results: the anisotropic factor, the etch rate and the degree of surface quality, the undercutting, the solution chemical aggressiveness toward masks. Etching profiles, SEM images are discussed on several orientations of etched plates. According to the experimental data base, an etchant is selected and the experimental conditions of etching are determined. 3D resonant structures are fabricated on the X cut using photolithographic process before the etching step. The final shapes of the structures are then characterized in view of inertial sensor design.

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A New Quartz Monolithic Differential Vibrating Beam Accelerometer

Cited by 33 publications

References 10 publications

Behavioural modelling of MEMS oscillators and phase noise simulation

Behavioural modelling of MEMS oscillators and phase noise simulation

Design of a new differential silicon resonant accelerometer with dual proofmasses using two-stage microlever

Langasite resonant structure: Micromachining and characterisation

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