A new scheme for reducing breathing trouble through MEMS based capacitive pressure sensor

Chattopadhyay, Madhurima; Chowdhury, Debjyoti

doi:10.1007/s00542-015-2707-0

Cited by 6 publications

(4 citation statements)

References 11 publications

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“…A detailed review of presently reported pressure sensors is discussed in this section. Chattopadhyay and Chowdhury (2016) report a scheme to measure the rate of respiration using a capacitive pressure sensor and brushless Direct Current (DC) motor. This scheme is used to monitor the patient's breathing rate and to maintain air pressure.…”

Section: Introductionmentioning

confidence: 99%

Capacitance pressure sensor with S-type electrode for improved sensitivity

Venkata

Rao

2021

Transactions of the Institute of Measurement and Control

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This paper aims at designing a differential pressure sensor. The objective of the work is to design and fabricate the electrodes of a capacitive pressure sensor, so as to measure absolute and differential pressure accurately with improved sensitivity. In place of conventional parallel plate diaphragm, S-type electrodes are proposed in the present work. The work comprises of study of the proposed design in terms of a mathematical model, input-output behavior along with detailed analysis of pressure distribution pattern. Output capacitance obtained for changes in pressure is converted to voltage with the suitable signal conditioning circuit and data acquisition system to acquire the signal on to a PC. A neural network model is designed to compensate the nonlinearities present in the sensor output. Input-output characteristics of the designed sensor shows an improved response as compared with existing pressure sensors.

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Section: Introductionmentioning

confidence: 99%

Capacitance pressure sensor with S-type electrode for improved sensitivity

Venkata

Rao

2021

Transactions of the Institute of Measurement and Control

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“…These advantages include higher sensitivity, rapid detection, and the integration of electrical readout circuits and sensing electrodes on a single chip. In spite of microelectromechanical systems (MEMS)-based capacitive sensors such as accelerometers [ 1 , 2 ], position sensors [ 3 , 4 ], pressure sensors [ 5 , 6 , 7 , 8 ], and moisture sensors [ 9 ], a growing body of literature has studied capacitive sensors for Laboratory on a Chip (LoC) applications. These applications include DNA hybridization detection [ 10 ], protein interactions quantification [ 11 ], cellular monitoring [ 12 , 13 , 14 ], bio-particle detection [ 15 ], microRNA detection [ 16 ], organic solvent monitoring [ 17 ], sensing of droplet parameters [ 18 ], and bacteria detection [ 19 , 20 ].…”

Section: Introductionmentioning

confidence: 99%

Toward High Throughput Core-CBCM CMOS Capacitive Sensors for Life Science Applications: A Novel Current-Mode for High Dynamic Range Circuitry

Forouhi

Dehghani

Ghafar-Zadeh

2018

Sensors

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This paper proposes a novel charge-based Complementary Metal Oxide Semiconductor (CMOS) capacitive sensor for life science applications. Charge-based capacitance measurement (CBCM) has significantly attracted the attention of researchers for the design and implementation of high-precision CMOS capacitive biosensors. A conventional core-CBCM capacitive sensor consists of a capacitance-to-voltage converter (CVC), followed by a voltage-to-digital converter. In spite of their high accuracy and low complexity, their input dynamic range (IDR) limits the advantages of core-CBCM capacitive sensors for most biological applications, including cellular monitoring. In this paper, after a brief review of core-CBCM capacitive sensors, we address this challenge by proposing a new current-mode core-CBCM design. In this design, we combine CBCM and current-controlled oscillator (CCO) structures to improve the IDR of the capacitive readout circuit. Using a 0.18 μm CMOS process, we demonstrate and discuss the Cadence simulation results to demonstrate the high performance of the proposed circuitry. Based on these results, the proposed circuit offers an IDR ranging from 873 aF to 70 fF with a resolution of about 10 aF. This CMOS capacitive sensor with such a wide IDR can be employed for monitoring cellular and molecular activities that are suitable for biological research and clinical purposes.

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“…The deformation detection method aims to detect the structure deflection induced by the pressure load, which is usually realized by a capacitive or optical sensing mechanism. For example, Chattopadhyay [ 13 ] presented a pressure sensor based on a capacitive sensing mechanism to detect the diaphragm deformation of the diaphragm, in which the sensor had a large non-linearity. Tang [ 14 ] presented an optical fiber grating-based pressure sensor with a sensitivity of −240 pm/MPa, however it had installation restrictions.…”

Section: Introductionmentioning

confidence: 99%

Application and Optimization of Stiffness Abruption Structures for Pressure Sensors with High Sensitivity and Anti-Overload Ability

Zhao

et al. 2017

Sensors

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The influence of diaphragm bending stiffness distribution on the stress concentration characteristics of a pressure sensing chip had been analyzed and discussed systematically. According to the analysis, a novel peninsula-island-based diaphragm structure was presented and applied to two differenet diaphragm shapes as sensing chips for pressure sensors. By well-designed bending stiffness distribution of the diaphragm, the elastic potential energy induced by diaphragm deformation was concentrated above the gap position, which remarkably increased the sensitivity of the sensing chip. An optimization method and the distribution pattern of the peninsula-island based diaphragm structure were also discussed. Two kinds of sensing chips combined with the peninsula-island structures distributing along the side edge and diagonal directions of rectangular diaphragm were fabricated and analyzed. By bonding the sensing chips with anti-overload glass bases, these two sensing chips were demonstrated by testing to achieve not only high sensitivity, but also good anti-overload ability. The experimental results showed that the proposed structures had the potential to measure ultra-low absolute pressures with high sensitivity and good anti-overload ability in an atmospheric environment.

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A new scheme for reducing breathing trouble through MEMS based capacitive pressure sensor

Cited by 6 publications

References 11 publications

Capacitance pressure sensor with S-type electrode for improved sensitivity

Capacitance pressure sensor with S-type electrode for improved sensitivity

Toward High Throughput Core-CBCM CMOS Capacitive Sensors for Life Science Applications: A Novel Current-Mode for High Dynamic Range Circuitry

Application and Optimization of Stiffness Abruption Structures for Pressure Sensors with High Sensitivity and Anti-Overload Ability

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