A New Stage-Wise Control Release Policy for Semiconductor Wafer Fabrication Systems

Singh, Rashmi; Mathirajan, M.

doi:10.1109/tsm.2020.3042856

Cited by 5 publications

(4 citation statements)

References 44 publications

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“…New dispatching rules [138,165,166,[169][170][171][172]175] Adaptive rules [110,149,177,178,180,188,190,191,193] Maintain multiple rules [60,[182][183][184][185] Closed-loop control [109,139,176,[194][195][196][197]…”

Section: Methods Referencesmentioning

confidence: 99%

“…Experiments that were carried out on the Minifab model showed the method outperforms the open-loop release policy and common dispatching rules. Moreover, to accurately reflect system workload, Singh and Mathirajan proposed a job release control method to maintain shop floor workload distributed into stages at a specific level [196]. Qiao et al proposed a closed-loop adaptive scheduling solution that consists of production data acquisition, dynamic disturbance identification, scheduling strategy adjustment, and schedule scheme generation four phase [197].…”

Section: Stochastic and Dynamic Schedulingmentioning

confidence: 99%

“…This figure indicates that SMOs' scheduling problems are covered in a variety of journals and conferences, mostly in the fields of engineering, computer science, automation, operations research, and management science. workload, Singh and Mathirajan proposed a job release control method to maintain shop floor workload distributed into stages at a specific level [196]. Qiao et al proposed a closed-loop adaptive scheduling solution that consists of production data acquisition, dynamic disturbance identification, scheduling strategy adjustment, and schedule scheme generation four phase [197].…”

Section: Current Research Progressmentioning

confidence: 99%

“…Objectives Approach/Result [195] wafer fabrication p-batch, machine breakdown average and standard deviation of cycle time, WIP closed-loop control, production release strategy, QTR rule [196] wafer fabrication r j , s lk , etc.…”

Section: References Operations Main Characteristicsmentioning

confidence: 99%

See 3 more Smart Citations

Problems and Solution Methods of Machine Scheduling in Semiconductor Manufacturing Operations: A Survey

Fang,

Cheang,

Lim

2023

Sustainability

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Machine scheduling problems associated with semiconductor manufacturing operations (SMOs) are one of the major research topics in the scheduling literature. Lots of papers have dealt with different variants of SMOs’ scheduling problems, which are generally difficult to tackle theoretically and computationally. In this paper, the single machine, parallel machines, flow shops, and job shops scheduling problems from SMOs have been reviewed, based on different processing constraints, e.g., batch processing, auxiliary resources, incompatible job families, and reentrant flow, etc., with the cycle time, flow time, and throughput-related performance measures. Given the vast and diverse nature of the current literature, it is urgently needed to make a systematic survey in order to identify the important research problems, research trends, and the progress of the related solution methods, as well as clarify future research perspectives. We hope the findings and observations could provide some insights to the researchers and practitioners in this domain.

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