A New Three-Dimensional Lithography Using Polymer Dispersed Liquid Crystal (PDLC) Films

Jeon, Jongwook; Choi, Joon-Yong; Yoon, Jun‐Bo; Lim, Koeng Su

doi:10.1109/memsys.2006.1627748

Cited by 4 publications

(1 citation statement)

References 11 publications

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“…The aspect ratio of the illumination map can be changed by the passive PDMS-microprism array, and can be applied for the specific illumination requirement accordingly. Moreover, this study employs the patterned polymer-dispersed liquid crystal (PDLC) film to realize the active microprism array for the application of light-modulating device [17]. The PDLC is extensively applied in display research due to the simple fabrication processes and the existing of transmitting and scattering modes characteristic [18,19].…”

Section: Introductionmentioning

confidence: 99%

Development of passive and active microprism arrays to change the radiation pattern of solid-state lighting

Lee¹,

Ting²,

Fang³

2012

J. Micromech. Microeng.

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This study implements a compact solid-state lighting chip with changeable illumination map as well as radiation pattern. The lighting chip consists of a microprism array, light-emitting diode (LED) chip and Si carrier. The polydimethylsiloxane (PDMS) and polymer-dispersed liquid crystal (PDLC) layers are respectively employed to implement the passive and active microprism arrays. The specific radiation pattern can be defined by the shape of the passive PDMS-microprism. Moreover, by using the scattering and transmitting modes of the PDLC layer, the PDLC-microprism enables the changing of light shaping by applying voltage. Thus, the radiation pattern can be changed by the driving voltage on the PDLC layer, and the deformable and movable micro optical components are not required. This study has established the low-temperature fabrication and packaging processes to realize the lighting chip, and the damage of the PDMS and PDLC material is prevented. Typical dimensions of the PDMS lighting chip are 5 mm wide, 6 mm long and 1 mm thick, and The PDLC lighting chip is 550 μm thick. The measurement results show that the PDMS-microprism array can change the radiation pattern from a 70 • half-maximum viewing angle to 52 • and 40 • half-maximum viewing angles on two orthogonal axes. In addition, the PDLC-microprism array can change the radiation pattern from 51 • and 43 • half-maximum viewing angles at 0 V (i.e. scattering mode) to 48 • and 33 • half-maximum viewing angles at 100 V (i.e. transmitting mode).

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Section: Introductionmentioning

confidence: 99%

Development of passive and active microprism arrays to change the radiation pattern of solid-state lighting

Lee¹,

Ting²,

Fang³

2012

J. Micromech. Microeng.

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A 3-D planar microlens for an effective monolithic optical interconnection system

Chang

Yoon

2006

IEEE Photon. Technol. Lett.

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Application of liquid crystal polymer films for photolithographic fabrication of 3D structures

Fox

Fontecchio

2008

SPIE Proceedings

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In this paper, we demonstrate a silicon etching application of a holographically formed polymer dispersed liquid crystal (H-PDLC) photomask. H-PDLC is a periodically nanostructured material consisting of stratified layers of polymer and liquid crystal. Due to the natural random alignment of the liquid crystal axes with respect to the polymer layers, an index of refraction mismatch exists and a reflection occurs. Application of bias across the film aligns the liquid crystals and eliminates the index mismatch causing the film to become transparent. H-PDLC films have been shown to sufficiently attenuate the UV exposure dose in the photolithographic process when in the unbiased state, and can be electrically controlled to modulate the amount of UV transmission when electric field is applied. We show etch depth profiles of patterns masked on a silicon substrate using the H-PDLC photomask device compared with etch profiles of similar structures patterned with more conventional ink jet printed photomasks and chrome on quartz glass photomasks. We investigate reactive ion etching technique and potassium hydroxide wet etch technique.

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A New Three-Dimensional Lithography Using Polymer Dispersed Liquid Crystal (PDLC) Films

Cited by 4 publications

References 11 publications

Development of passive and active microprism arrays to change the radiation pattern of solid-state lighting

Development of passive and active microprism arrays to change the radiation pattern of solid-state lighting

A 3-D planar microlens for an effective monolithic optical interconnection system

Application of liquid crystal polymer films for photolithographic fabrication of 3D structures

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