A new tubular hot-wire CVD for diamond coating

Motahari, Hamid; Bellah, S. Moemen; Malekfar, Rasoul

doi:10.1007/s00339-017-1024-0

Cited by 3 publications

(2 citation statements)

References 33 publications

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“…A new tubular hot-wire CVD system using a tubular quartz vacuum chamber has been designed by Motahari et al [41]. In their system, the filaments can heat the substrate and act as a gas activator and thermal activator for gas species at the same time.…”

Section: Special Controls Of Deposition Processmentioning

confidence: 99%

“…Micromachines 2020, 11, x 6 of 21 growth temperature could help to directly deposit diamond films on steel substrates, but the growth rate decreases and the diamond quality is lower, which is not worthwhile. A new tubular hot-wire CVD system using a tubular quartz vacuum chamber has been designed by Motahari et al [41]. In their system, the filaments can heat the substrate and act as a gas activator and thermal activator for gas species at the same time.…”

Section: Special Controls Of Deposition Processmentioning

confidence: 99%

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Diamond Deposition on Iron and Steel Substrates: A Review

et al. 2020

Micromachines

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This article presents an overview of the research in chemical vapor deposition (CVD) diamond films on steel substrates. Since the steels are the most commonly used and cost-effective structural materials in modern industry, CVD coating diamond films on steel substrates are extremely important, combining the unique surface properties of diamond with the superior toughness and strength of the core steel substrates, and will open up many new applications in the industry. However, CVD diamond deposition on steel substrates continues to be a persistent problem. We go through the most relevant results of the last two and a half decades, including recent advances in our group. This review discusses the essential reason of the thick catalytic graphite interlayer formed on steel substrates before diamond deposition. The high carbon diffusion in iron would induce severe internal carburization, and then voluminous graphite precipitated from the substrate. In order to hinder the catalytic graphite formation, various methods have been applied for the adherent diamond film deposition, such as pre-imposed various interlayers or multi-interlayers, special controls of the deposition process, the approaches of substrate alloying and so on. We found that adherent diamond films can be directly deposited on Al alloying steel substrates, and then the role of Al alloying element was examined. That is a thin dense amorphous alumina sublayer in situ formed on the alloying substrate, which played a critical role in preventing the formation of graphite phase and consequently enhancing diamond growth and adhesion. The mechanism of Al alloying suggests that the way used to improve hot corrosion resistance is also applicable. Then, some of the hot corrosion resistance methods, such as aluminizing, siliconizing, and so on, which have been used by some researchers examining CVD diamond films on steel substrates, are reviewed. Another way is to prepare diamond-like carbon (DLC) films on steel substrates at low temperature, and then the precipitated graphite from the internal carburization can be effectively avoided. In addition, based on some new findings, the understanding of the diamond nucleation and metastable growth is discussed.

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Section: Special Controls Of Deposition Processmentioning

confidence: 99%

Section: Special Controls Of Deposition Processmentioning

confidence: 99%