Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95
DOI: 10.1109/sensor.1995.717317
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A Non-contact Inductive Position Sensor For Use In Micro Machines

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Cited by 11 publications
(3 citation statements)
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“…Industrial sensors for measuring linear and angular positions are widely known [1]- [12]. They have to meet certain criteria such as reliability, small size, wide temperature range, insensitivity to moisture, dust and mechanical offsets and long life.…”
Section: Introductionmentioning
confidence: 99%
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“…Industrial sensors for measuring linear and angular positions are widely known [1]- [12]. They have to meet certain criteria such as reliability, small size, wide temperature range, insensitivity to moisture, dust and mechanical offsets and long life.…”
Section: Introductionmentioning
confidence: 99%
“…Further analysis of the signals picked up by the receiver coils in terms of phase and amplitude determine the position of the target. In addition one advantage of this type of sensor compared to current designs [1]- [12] is that multiple targets can be detected by using different transmit frequencies. Furthermore, the sensor is sensitive only to the target's movement in the measurement direction.…”
Section: Introductionmentioning
confidence: 99%
“…In the development of position-measurement systems to be used in micro-magnetic bearings for micro-machines it has been proposed that inductive sensors utilizing eddy-current effects be used to reduce the effects of scaling laws on their operation [1]. To minimize the influence of parasitic capacitances on the performance of these inductive sensors when operating at high frequencies it has been proposed that wide-band trans-impedance amplifiers (termed currentvoltage converters) be used as input amplifiers for the signal conditioners for these position-measurement systems.…”
Section: Introductionmentioning
confidence: 99%