2016
DOI: 10.1016/j.ultramic.2015.09.012
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A novel 3D absorption correction method for quantitative EDX-STEM tomography

Abstract: This paper presents a novel 3D method to correct for absorption in energy dispersive X-ray (EDX) microanalysis of heterogeneous samples of unknown structure and composition. By using STEM-based tomography coupled with EDX, an initial 3D reconstruction is used to extract the location of generated X-rays as well as the X-ray path through the sample to the surface. The absorption correction needed to retrieve the generated X-ray intensity is then calculated voxel-by-voxel estimating the different compositions enc… Show more

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Cited by 36 publications
(33 citation statements)
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“…Postprocessing of EDX data was performed with the open source Hyperspy software, hyperspy.org, as described elsewhere. 45 Xray absorption spectra at the Fe K edge in fluorescence mode were recorded at the SAMBA beamline of the SOLEIL Synchrotron. The objectives of these measurements were (a) to determine the atomic distances on the local environments of the Fe ions in both the FePc and the FePcCl nanowires and crystalline reference samples and (b) to quantify the vertical Fe−Fe separation on the nanowire stacking.…”
Section: Chemistry Of Materialsmentioning
confidence: 99%
“…Postprocessing of EDX data was performed with the open source Hyperspy software, hyperspy.org, as described elsewhere. 45 Xray absorption spectra at the Fe K edge in fluorescence mode were recorded at the SAMBA beamline of the SOLEIL Synchrotron. The objectives of these measurements were (a) to determine the atomic distances on the local environments of the Fe ions in both the FePc and the FePcCl nanowires and crystalline reference samples and (b) to quantify the vertical Fe−Fe separation on the nanowire stacking.…”
Section: Chemistry Of Materialsmentioning
confidence: 99%
“…The error bars were determined through error propagation as described in the literature . In cases where absorption effects cannot be ignored, it is still possible to obtain a quantitative XEDS reconstruction, but it is necessary to integrate our method with the iterative technique proposed by Burdet et al…”
Section: Resultsmentioning
confidence: 99%
“…These maps can be used directly as an input for a tomographic algorithm such that a different reconstruction for each element is obtained . Next, these reconstructions can be quantified by analyzing the voxel intensities using the Cliff–Lorimer or ζ ‐factor method . The outcome of this approach is predominantly determined by the quality of the tomogram and therefore by the number of available projections.…”
Section: Methodsmentioning
confidence: 99%
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