A novel 5DOF thin coplanar nanometer-scale stage

Jywe, Wen-Yuh; Jeng, Yeau-Ren; Liu, Chien-Hung; Teng, Yun Feng; Wu, Chia‐Hung; Wang, Hung Shu; Chen, Yi Jou

doi:10.1016/j.precisioneng.2007.11.001

Cited by 30 publications

(10 citation statements)

References 15 publications

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“…To achieve high non-actuating stiffness, all other components in C s must be as low as possible. Thus, the objective function is min F 1 (x) = 6 i=2 i j=1 C ij (C 11 ) 19 (C 66 ) 19 (6) Considering that C s is a symmetrical matrix with 36 components, only the 6 diagonal components and the 15 non-diagonal components are required to optimize through Eq. (6).…”

Section: Synthesis Of the Passive Pr Compliant Jointmentioning

confidence: 99%

“…In addition, the limited displacement of the compliant joints suits the limited motion range of the parallel-kinematic architecture. Hence, the FPMs are ideal candidates for micro/nano-scale manipulations [2][3][4][5][6]. The frictionless characteristic of these FPMs also suit clean vacuum environment since no particles will be generated from friction.…”

Section: Introductionmentioning

confidence: 99%

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Integrating mechanism synthesis and topological optimization technique for stiffness-oriented design of a three degrees-of-freedom flexure-based parallel mechanism

Lum

Teo

Yang

et al. 2015

Precision Engineering

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Section: Synthesis Of the Passive Pr Compliant Jointmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Integrating mechanism synthesis and topological optimization technique for stiffness-oriented design of a three degrees-of-freedom flexure-based parallel mechanism

Lum

Teo

Yang

et al. 2015

Precision Engineering

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“…Alternatively, flexure-based compliant guiding mechanisms [14]- [16] have been widely employed due to the absence of the aforementioned disadvantages. The reason lies in that the flexure compliant mechanisms deliver motions by making use of elastic deformations of the material [17]. Consequently, they render attractive merits in terms of no backlash, no friction, vacuum compatibility, low cost, and repeatable motion [18].…”

Section: Introductionmentioning

confidence: 99%

Design and Development of a Compact Flexure-Based $XY$ Precision Positioning System With Centimeter Range

2014

IEEE Trans. Ind. Electron.

217

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This paper presents the design and development of a novel flexure parallel-kinematics precision positioning stage with a centimeter range and compact dimension. The stage mechanism is devised using leaf flexures to achieve a decoupled and modular structure. Structural parameters are carefully designed to guarantee the range, stiffness, resonant frequency, and payload capabilities in consideration of manufacturing tolerance. The parametric design is verified by conducting finite-element analysis, which reveals a reachable motion range over 20 mm in each working axis. Moreover, a prototype XY stage is fabricated, which is actuated and sensed by two voice coil motors and laser displacement sensors, respectively. Experimental results demonstrate that the stage is capable of positioning with a workspace over 11 mm × 11 mm. It is more compact than existing works, which is reflected by a larger area ratio of workspace to planar dimension. Both static and dynamic tests exhibit a small crosstalk between the two axes, which indicates a well-decoupled motion property. The implemented feedback control enables a precision positioning with submicrometer resolution and accuracy. The control bandwidth and payload influences on stage performances are experimentally examined as well.

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“…According to kinematic equations, the motors on a coplanar stage can be operated simultaneously to move the stage to the target position faster; this is very useful for quick alignment. For ultrahigh precision alignment, a piezoelectric based nanostage, which is complainer type of stage, is commonly used for high accuracy positioning or error compensation [5][6][7]. However, the piezoelectric based stages have nanograde positioning resolution and high sensitivity that are too expensive and a glass substrate alignment system does not need to use a compensation stage with nanograde resolution.…”

Section: Introductionmentioning

confidence: 99%

Development of a High Precision Edge Alignment System for Touch-Panel Glass Substrates

Lee

Liu

Chen

2014

Advances in Mechanical Engineering

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There are two kinds of alignment systems, marked and unmarked. The glass substrate for touch panels is categorized as an unmarked work piece. Vision based glass substrate alignment (GSA) relies on the edge of the glass. Traditional GSA systems compensate first for angular and then for linear error. This reduces alignment accuracy and increases alignment time and edge detection usually takes longer than 10 ms. This study proposes an effortless edge detection method. This method is very simple and can significantly reduce the time taken to detect the edge to about 6 ms using a 1.3 megapixel image. In this study, a floating center idea is used to control the glass substrate on a high precision coplanar alignment stage. According to the method, users can set the rotation center anywhere as long as it is on the working ( ) plane. Tolerance prognosis is also considered in this study to help the operator decide if the substrate is usable or should be rejected. The experimental results show alignment repeatability of the , , and axes to be 1 m, 1 m, and 5 arcsec, respectively.

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A novel 5DOF thin coplanar nanometer-scale stage

Cited by 30 publications

References 15 publications

Integrating mechanism synthesis and topological optimization technique for stiffness-oriented design of a three degrees-of-freedom flexure-based parallel mechanism

Integrating mechanism synthesis and topological optimization technique for stiffness-oriented design of a three degrees-of-freedom flexure-based parallel mechanism

Design and Development of a Compact Flexure-Based $XY$ Precision Positioning System With Centimeter Range

Development of a High Precision Edge Alignment System for Touch-Panel Glass Substrates

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