2008
DOI: 10.1109/commad.2008.4802111
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A novel 6H-SiC UMOSFET_ACCUFET with low specific on-resistance and peak electric field

Abstract: In this paper, a novel power UMOSFET_ACCUFET structure, based-on 6H-SiC, has been investigated. By varying the dimensions and doping concentrations of specific regions, we have obtained optimized electric field and on-resistance. Two approaches have been applied to the simple UMOSFET structure, both of which result in lower peak electric field in the device in the blocking state.

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Cited by 2 publications
(1 citation statement)
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“…In case of an accumulation channel trench MOSFET, the width of the channel formed by the same gate voltage is much wider. 5) Consequently, the channel resistance of an accumulation channel MOSFET is lower than that of an inversion channel MOSFETs Fig. 2(a) shows a cross-sectional view of the inversion channel trench MOSFET structure.…”
Section: Introductionmentioning
confidence: 99%
“…In case of an accumulation channel trench MOSFET, the width of the channel formed by the same gate voltage is much wider. 5) Consequently, the channel resistance of an accumulation channel MOSFET is lower than that of an inversion channel MOSFETs Fig. 2(a) shows a cross-sectional view of the inversion channel trench MOSFET structure.…”
Section: Introductionmentioning
confidence: 99%