A Novel Approach for Batch Fabrication of Bifunctional AFM-SECM Probes

Abstract

This paper presents a novel batch fabrication process for manufacturing bifunctional Scanning Electrochemical-Atomic Force Microscopy (AFM-SECM) probes with a recessed integrated ring electrode. The presented tip fabrication procedure enables the integration of a micro ring electrode at a precisely defined distance above the apex of the AFM tip. The electroactive area integrated into a scanning probe tip allows obtaining electrochemical data independently and separated from the topographical image. The tip fabrication is based upon batch processing, which provides bifunctional scanning probe tips on a wafer scale at low cost with high processing reproducibility and uniformity. Electrochemical characterization of an AFM tip-integrated ring electrode and combined electrochemical and topographical imaging using the bifunctional probe are demonstrated in this study.

Batch Fabrication of Atomic Force Microscopy Probes with Recessed Integrated Ring Microelectrodes at a Wafer Level

“…A scheme for the fabrication of an AFM cantilever with integrated ring microelectrode is illustrated in Figure . The batch processes for the AFM cantilever and the microelectrode fabrication are described in detail elsewhere . The AFM tip and cantilever were fabricated on 4 in.…”