A novel bulk micromachined electrostatic microvalve with a curved-compliant structure applicable for a pneumatic tactile display

Yobaş, Levent; Huff, Michael; Lisy, F.J.; Durand, Dominique M.

doi:10.1109/84.925734

Cited by 48 publications

(29 citation statements)

References 19 publications

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“…Parallel plate actuators are used for many applications, including force rebalance in accelerometers [13] [14] [15], deformable optics [16], relays, and valves [17] [18]. Generally, these parallel-plate actuators have very limited range (usually 1/3 of the starting gap), and have to be feedback-controlled to achieve useful response.…”

Section: Introductionmentioning

confidence: 99%

Design of large deflection electrostatic actuators

Grade¹,

Jerman²,

Kenny

2003

J. Microelectromech. Syst.

199

156

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Abstract-Electrostatic, comb-drive actuators have been designed for applications requiring displacements of up to 150 µm in less than 1 msec. A nonlinear model of the actuator relates the resonant frequency and the maximum stable deflection to the actuator dimensions. A suite of experiments that were carried out on DRIE, single-crystal silicon, comb-drive actuators confirm the validity of the model. Four actuator design improvements were implemented. First, a folded-flexure suspension consisting of two folded beams rather than four and a U-shaped shuttle allowed the actuator area to be cut in half without degrading its performance. Second, the comb teeth were designed with linearly increasing lengths to reduce side instability by a factor of two. Third, the folded-flexure suspensions were fabricated in an initially bent configuration, improving the suspension stiffness ratio and reducing side instability by an additional factor of 30. Finally, additional actuation range was achieved using a launch and capture actuation scheme in which the actuator was allowed to swing backward after full forward deflection; the shuttle was captured and held using the backs of the comb banks as high-force, parallel-plate actuators.

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Section: Introductionmentioning

confidence: 99%

Design of large deflection electrostatic actuators

Grade¹,

Jerman²,

Kenny

2003

J. Microelectromech. Syst.

199

156

View full text Add to dashboard Cite

show abstract

“…This is a single-wafer fabrication process, which has been extended to arrays of valve by Vandelli et al [39] for fluid flow control. Here the applied voltage is greater than the pull-in voltage [40].…”

Section: Electrostatic Actuationmentioning

confidence: 99%

Microvalve for Fuel Cells and Miniature Gas Chromatographic System

2003

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Microvalves are important for fluid control in a variety of applications, ranging from miniaturized chemical analysis systems, to precision manufacturing and miniature fuel cells. MEMS technology provides the opportunity to miniaturize valves that work with smaller sample volume, operate rapidly with low power and can potentially be integrated with other components on a single chip. A review of actuators for microvalves is provided, including electrostatic, magnetic, piezoelectric, thermal, shape memory alloy and hydrogel. The design and simulation of a magnetic latching microvalve is provided as a case study. The fabrication by surface micromachining with low temperature, potentially CMOS compatible processing is given.

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“…Moving parts, in most cases membranes fabricated of silicon or additionally required active or passive valves, may result in short lifetime and low reliability. Displacement pumps with bimetallic [2], electrostatic [3,4], thermo-pneumatic [5,6], piezoelectric [7,8] and other drivers [9] have been reported. The properties of those systems regarding long term stability are still not known.…”

Section: Introductionmentioning

confidence: 99%

Micro-jet Pump for Micro-fluidic Systems

Cui

et al. 2006

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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Abstract-A novel micro-jet pump based on the principle of macroscopic jet pump are presented. The micro-jet pump can be used very easily for sampling in micro-fluidic systems under gas actuation. Vacuum suction mode provided by the pump can effectively decreases the formation of air bubbles and overcomes the interface tension between the liquid and solid wall in the micro-fluidic systems. Structurally the pump consists of a nozzle, a throat pipe and a pump chamber, which can be fabricated by means of silicon micro-machining technology. To obtain optimized parameters for the future designs, various pump configurations with different geometries were simulated through FLUENT, and the characteristics of the gas-actuated micro-jet pump was studied experimentally. The pump began to work at a threshold gas actuation pressure of 2kPa, which can be realized easily by a medical syringe.

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A novel bulk micromachined electrostatic microvalve with a curved-compliant structure applicable for a pneumatic tactile display

Cited by 48 publications

References 19 publications

Design of large deflection electrostatic actuators

Design of large deflection electrostatic actuators

Microvalve for Fuel Cells and Miniature Gas Chromatographic System

Micro-jet Pump for Micro-fluidic Systems

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