A novel dynamic pull-in MEMS gyroscope

Sharma, Monika; Sarraf, Élie; Cretu, Edmond

doi:10.1016/j.proeng.2011.12.014

Cited by 9 publications

(6 citation statements)

References 2 publications

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“…= 1 + 9.638 . (14) where is the Knudsen number and is the air viscosity at room conditions. The Knudsen number is an estimate of the gas rarefaction effect and it can be defined as;…”

Section: Air Damping Model For Mems Gyroscopementioning

confidence: 99%

“…To mitigate this error, frequency tuning is required, and for this purpose a phenomenon called electrostatic spring softening is used to change the stiffness of the structure electronically and therefore change the frequency. This method allows the designer to reduce the mismatch and to get the optimal performance of the MEMS gyroscope [13,14]. The number of proof masses in resonant MEMS gyroscopes can affect the common mode errors and therefore the performance of the gyroscope.…”

Section: Introductionmentioning

confidence: 99%

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A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation

2021

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The micro-electro-mechanical systems (MEMS)-based sensor technologies are considered to be the enabling factor for the future development of smart sensing applications, mainly due to their small size, low power consumption and relatively low cost. This paper presents a new structurally and thermally stable design of a resonant mode-matched electrostatic z-axis MEMS gyroscope considering the foundry constraints of relatively low cost and commercially available silicon-on-insulator multi-user MEMS processes (SOIMUMPs) microfabrication process. The novelty of the proposed MEMS gyroscope design lies in the implementation of two separate masses for the drive and sense axis using a unique mechanical spring configuration that allows minimizing the cross-axis coupling between the drive and sense modes. For frequency mismatch compensation between the drive and sense modes due to foundry process uncertainties and gyroscope operating temperature variations, a comb-drive-based electrostatic tuning is implemented in the proposed design. The performance of the MEMS gyroscope design is verified through a detailed coupled-field electric-structural-thermal finite element method (FEM)-based analysis.

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“…= 1 + 9.638 . (14) where is the Knudsen number and is the air viscosity at room conditions. The Knudsen number is an estimate of the gas rarefaction effect and it can be defined as;…”

Section: Air Damping Model For Mems Gyroscopementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation

2021

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“…[ 17 ] also investigated the mechanical–thermal noise of a micro-machined gyroscope. Sharma et al [ 18 ] numerically and experimentally analyzed the pull-in phenomenon of a micro-machined gyroscope and discussed the effects of the dynamic pull-in voltage and the measured angular velocity. Tehrani et al [ 19 ] experimentally described the performance of an MEMS gyroscope with different forms of mechanical and electrostatic nonlinearities, and found that a low-angle random walk can be achieved even though the gyroscope’s drive mode exhibits high amplitude–frequency dependence, and that the bias instability is largely independent of the operating regime.…”

Section: Introductionmentioning

confidence: 99%

Bifurcation Analysis of a Micro-Machined Gyroscope with Nonlinear Stiffness and Electrostatic Forces

Zhang

2021

Micromachines

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The bifurcation of the periodic response of a micro-machined gyroscope with cubic supporting stiffness and fractional electrostatic forces is investigated. The pull-in phenomenon is analyzed to show that the system can have a stable periodic response when the detecting voltage is kept within a certain range. The method of averaging and the residue theorem are employed to give the averaging equations for the case of primary resonance and 1:1 internal resonance. Transition sets on the driving/detecting voltage plane that divide the parameter plane into 12 persistent regions and the corresponding bifurcation diagrams are obtained via the singularity theory. The results show that multiple solutions of the resonance curves appear with a large driving voltage and a small detecting voltage, which may lead to an uncertain output of the gyroscope. The effects of driving and detecting voltages on mechanical sensitivity and nonlinearity are analyzed for three persistent regions considering the operation requirements of the micro-machined gyroscope. The results indicate that in the region with a small driving voltage, the mechanical sensitivity is much smaller. In the other two regions, the variations in the mechanical sensitivity and nonlinearity are analogous. It is possible that the system has a maximum mechanical sensitivity and minimum nonlinearity for an appropriate range of detecting voltages.

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“…Significant research has also been devoted to developing an alternative method to amplify the sensor response to stimuli, namely bifurcation-based sensing [16][17][18][19][20][21]. It exploits static (saddle-node) or dynamic (cyclic-fold) bifurcations [22,23] observed in piezoelectric [16] or electrostatic MEMS transducers [17][18][19][20]. Khater et al [17] proposed and demonstrated a binary MEMS ethanol sensor that undergoes static pull-in when the functionalized polymer absorbs ethanol molecules.…”

Section: Introductionmentioning

confidence: 99%

“…Khater et al [17] proposed and demonstrated a binary MEMS ethanol sensor that undergoes static pull-in when the functionalized polymer absorbs ethanol molecules. Sharma et al [18] proposed and validated the operation of an electrostatic MEMS vibratory gyroscope exploiting dynamic pull-in. Bajaj et al [21] studied tunable, dynamic pull-in observed in a quartz crystal with cubic nonlinear feedback implemented using analog multipliers.…”

Section: Introductionmentioning

confidence: 99%

Detection of cyclic-fold bifurcation in electrostatic MEMS transducers by motion-induced current

Park

Khater

Effa

et al. 2017

J. Micromech. Microeng.

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This paper presents a new detection method of cyclic-fold bifurcations in electrostatic MEMS transducers based on a variant of the harmonic detection of resonance method. The electrostatic transducer is driven by an unbiased harmonic signal at half its natural frequency, ω a = 1/2 ω o . The response of the transducer consists of static displacement and a series of harmonics at 2 ω a , 4 ω a , and so on. Its motion-induced current is shifted by the excitation frequency, ω a , to appear at 3 ω a , 5 ω a , and higher odd harmonics, providing higher sensitivity to the measurement of harmonic motions. With this method, we successfully detected the variation in the location of the cyclic-fold bifurcation of an encapsulated electrostatic MEMS transducer. We also detected a regime of tapping mode motions subsequent to the bifurcation.

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A novel dynamic pull-in MEMS gyroscope

Cited by 9 publications

References 2 publications

A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation

A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation

Bifurcation Analysis of a Micro-Machined Gyroscope with Nonlinear Stiffness and Electrostatic Forces

Detection of cyclic-fold bifurcation in electrostatic MEMS transducers by motion-induced current

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