A Novel Fabrication Method for Forming Inclined Groove-Based Microstructures Using Optical Elements

Huang, Ying Jui; Chang, Tien-Li; Chou, H.P.; Lin, Cheng

doi:10.1143/jjap.47.5287

Cited by 13 publications

(6 citation statements)

References 12 publications

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“…Besides the expansion of the exposure angle, the prism-assisted UV lithography is also attractive in one-step exposure fabrication of 3D structures with multi-directional inclined angles. The fabrication of V-cut structures with a right angle prism has been reported (Huang et al, 2008). A multi-surface optical prism of a polyhedron pyramid structure (a polyhedron pyramid prism) is introduced here to assist the fabrication of some particular microstructures as depicted in Fig.…”

Section: Prism-assisted On-step Uv Lithography For Multidirectional Inclined Structuresmentioning

confidence: 99%

Updates in Advanced Lithography

Hosaka¹

2013

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Sumio Hosaka was born in Japan in 1948. He received the Ph. D. degree in Engineering from Waseda University, Tokyo, in 1983. He joined the Hitachi Central Research Lab. (HCRL), Co. Ltd. Kokubunji, Tokyo in 1971, working in semiconductor lithography using electron, ion and light beams, nano-metrology using electron beam microscopy and scanning probe microscopy (SPM) techniques, in HCRL and terabyte huge storage using SPM in the Hitachi Advanced Research Lab. (HARL). After he joined the Hitachi Kenki Co., Tsuchiura, Ibaraki in 2000, working in-line atomic force microscope products based on his invention of first optical lever type atomic force microscope at 1987, he joined to department of electronic engineering, Gunma University, Kiryu, Gunma, in 2001. Today, he works in division of electronics and informatics, faculty of science and technology in Gunma University. Since 2001, he has been professor in the university, and is working on nano devices such as quantum conductance atomic switch (QCAS) and phase change memory, nano lithography and fabrication such as EB drawing, self-assembled nano dot arrays and patterned media in huge magnetic storage, and nano metrology based on atomic force controlling, near-field light, Raman spectroscopy and polarized light image in SPM applications. ContentsPreface XI Section Lithography for 3D Structure and Nano Scale 1

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Section: Prism-assisted On-step Uv Lithography For Multidirectional Inclined Structuresmentioning

confidence: 99%

Updates in Advanced Lithography

Hosaka¹

2013

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“…Besides the expansion of the exposure angle, the prism-assisted UV lithography is found to be more attractive in creating 3D structures with multidirectional inclined angles by one-step UV exposure fabrication. Fabrication of V-cut structures has been reported by using a right angle prism [18]. We introduce a multi-surface optical prism of a polyhedron pyramid structure (a polyhedron pyramid prism) to assist in the fabrication of some particular microstructures as depicted in figure 5(a).…”

Section: Prism-assisted One-step Uv Lithography For Multidirectional ...mentioning

confidence: 99%

Prism-assisted inclined UV lithography for 3D microstructure fabrication

Jiang

Baig

Wang

2012

J. Micromech. Microeng.

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A prism-assisted inclined ultraviolet (UV) lithography technique is introduced for the fabrication of three-dimensional (3D) microstructures. Slanted structures with exposure angles ranging from 0 • to 60 • in SU-8 photoresist have been easily achieved without immersion in the index matching liquid. The fabrication process of multidirectional slanted structures can be simplified by one-step UV exposure using a prism with multidirectional side surfaces. A corner prism and a cone prism have been used in our experiment to demonstrate this concept. Upside-down tripod structures and horn structures have been fabricated in one-step exposures. The effective exposure area as one key parameter of the one-step exposure is analyzed for practical applications. Examples of various 3D microstructures fabricated by this method are presented.

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“…However, these methods exhibit some challenges: for instance the inclined exposure suffer from non-uniform patterning due to different distances from the energy source (e.g. UV light); the moving mask method presents problems with the precision of the moving stage, which affects the final surface morphology and micro-lens-based techniques often suffer from aberration effects due to the curvature of the micro-lenses 15 . Another possibility is the fabrication of inclined structures with mechanical techniques such as ultra-precision machining.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of inclined non-symmetrical periodic micro-structures using Direct Laser Interference Patterning

Alamri

El-Khoury

Aguilar‐Morales

et al. 2019

Sci Rep

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The direct fabrication of microstructures, having a non-symmetrical morphology with controllable inclination, presents nowadays a challenging task. Natural examples of surfaces with inclined topographies have shown to provide anisotropic functionalities, which have attracted the interest of several researchers in the last years. This work presents a microfabrication technique for producing microstructures with a determined and controllable inclination angle using two-beam Direct Laser Interference Patterning. Polyimide foils are irradiated with a 4 ns UV (266 nm) laser source producing line-like structures with a period varying from 4.6 µm to 16.5 µm. The inclinations, retrieved by tilting the sample with respect to the optical axis of the setup, are changed from 0° to 75°, introducing a well controllable and defined inclination of the structure walls. The structuring parameters (laser fluence, number of laser pulses and interference period) as well as the inclination of the microstructures are correlated with the global tilting of the sample. As a result, a determined laser fluence and number of pulses are necessary to observe a remarkable non-symmetrical morphology of the structures. In addition, the presence of structural undercuts is reported, which opens the possibility for developing new direction-dependent properties on polymeric materials. As an example, preliminary results on light diffraction are presented, showing a similar behavior as blazed diffraction gratings.

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A Novel Fabrication Method for Forming Inclined Groove-Based Microstructures Using Optical Elements

Cited by 13 publications

References 12 publications

Updates in Advanced Lithography

Updates in Advanced Lithography

Prism-assisted inclined UV lithography for 3D microstructure fabrication

Fabrication of inclined non-symmetrical periodic micro-structures using Direct Laser Interference Patterning

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