A Novel High-Symmetry Cobweb-Like Disk Resonator Gyroscope

Fan, Bo; Guo, Shuwen; Cheng, Mengmeng; Yu, Lei; Zhou, Ming; Hu, Wenbin; Chen, Ziang; Xu, Dacheng

doi:10.1109/jsen.2019.2931705

Cited by 18 publications

(14 citation statements)

References 28 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…is the excitation voltages of the driving mode and the sensing mode, respectively. Equation (12) shows that the V dx generates electrostatic stiffness along the y-axis is approximately 0, and the same is true of V dy . Furthermore, the corresponding axial stiffness can be softened by adjusting V dx or V dy independently.…”

Section: Electrostatic Force and Electrostatic Negative Stiffness Effectmentioning

confidence: 87%

“…The most common high-performance vibration gyroscopes are based on the energy transfer caused by the Coriolis coupling between a pair of degenerate vibration modes associated with an axisymmetric structure. Common examples include hemispherical shells [2][3][4], rings [5][6][7][8], and disks [9][10][11][12]. The disk resonator gyroscope (DRG) is a kind of high-performance MEMS gyroscope that has attracted much attention in recent years [13,14].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

et al. 2020

View full text Add to dashboard Cite

An automatic mode-matching method for MEMS (Micro-electromechanical Systems) disk resonator gyroscopes (DRGs) based on virtual Coriolis force is presented in this paper. For this mode-matching method, the additional tuning electrodes are not required to be designed, which simplifies the structure design. By using the quadratic relationship between the driving voltage and the electrostatic force, the virtual Coriolis force is obtained by applying an AC voltage whose frequency is half of the driving mode resonant frequency to the sense electrode. The phase difference between the virtual Coriolis force and the sense output signal is used for mode-matching. The structural characteristics and electrode distribution of the DRG are briefly introduced. Moreover, the mode-matching theories of the DRG are studied in detail. The scheme of the mode-matching control system is proposed. Simultaneously, the feasibility and effectiveness of the mode-matching method are verified by system simulation. The experimental results show that under the control of mode-matching at room temperature, the bias instability is reduced from 30.7575 • /h to 2.8331 • /h, and the Angle Random Walk (ARW) decreases from 1.0208 • / √ h to 0.0524 • / √ h. Compared with the mode mismatch condition, the ARW is improved by 19.48 times.Micromachines 2020, 11, 210 2 of 22 Therefore, the mode-matching technology improves the bias stability and mechanical sensitivity of MEMS gyroscopes by eliminating the frequency split between the driving mode and the sensing mode, which has attracted significant attention from researchers [19][20][21]. Furthermore, some frequency modification techniques are proposed. Laser finishing, ion beam milling, and selective deposition mass loading reduce frequency split [22,23]. However, these methods are often used to change the dynamic characteristics of the sensor permanently, and this type of tuning is inflexible and time-consuming. The tuning control is limited and can only be achieved offline.Electrostatic tuning is usually used for mode-matching, which can provide more flexibility and real-time realization [24][25][26][27][28][29]. The mode-matching process based on phase-locked loop (PLL) takes advantage of the phase delay of 90 • between the quadrature input and output of the sensing mode. This feature is used in [27] to achieve mode-matching and to adjust the tuning voltage using PLL technology. The amplitude-frequency characteristic refers to the maximum amplitude of the quadrature response signal during mode-matching [28]. However, in these methods, the signal from the Coriolis demodulation channel is used to control the frequency tuning voltage. Therefore, the angular velocity can only be measured if the tuning voltage is fixed, and the matching loop is disconnected after mode-matching. Thus, these methods cannot achieve real-time mode-matching. However, in practical applications, the frequency split of the vibratory mode changes with changes in environmental parameters [29]. Therefore, such one-time matching methods a...

show abstract

Section: Electrostatic Force and Electrostatic Negative Stiffness Effectmentioning

confidence: 87%

Section: Introductionmentioning

confidence: 99%

Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

et al. 2020

View full text Add to dashboard Cite

show abstract

“…Table 2 shows that the changes in

and

were very small and had a limited effect on the ZRO drift. For

, because CDRG had a symmetrical structure, the change trajectories of the frequency and Q-factor of the two modes with temperature were essentially the same [ 22 ]; therefore, the change in

was not significant. In contrast, the changes in

and

were large, which contributed significantly to the ZRO drift.…”

Section: Online Compensation For Zro Drift Under Mode IImentioning

confidence: 99%

“…Moreover, an online ZRO bias compensation method based on multiparameter fusion is proposed. Comparative experiments were performed on a cobweb-like disk resonator gyroscope (CDRG) [ 21 , 22 ]. The results showed that Mode II is more suitable for high-Q gyroscopes whose quadrature error fluctuates easily, and the bias stability can be effectively improved by compensation.…”

Section: Introductionmentioning

confidence: 99%

Effect of Quadrature Control Mode on ZRO Drift of MEMS Gyroscope and Online Compensation Method

Guo

Fan

et al. 2022

Micromachines

Self Cite

View full text Add to dashboard Cite

The quadrature coupling error is an important factor that affects the detection output of microelectromechanical system (MEMS) gyroscopes. In this study, two quadrature error control methods, quadrature force-to-rebalance control (Mode I) and quadrature stiffness control (Mode II) were analyzed. We obtained the main factors affecting the zero-rate output (ZRO) under force-to-rebalance (FTR) closed-loop detection. The analysis results showed that the circuit phase delay in Mode I caused the quadrature channel to leak into the in-phase channel. However, in Mode II, the quadrature coupling stiffness was corrected in real time, which effectively improved the stability of the ZRO. The changes in the vibration displacement and Q-factor were the main factors for the ZRO drift in Mode II. Therefore, we propose an online compensation method for ZRO drift based on multiparameter fusion. The experimental results on a cobweb-like disk resonator gyroscope (CDRG) with a 340 k Q-factor showed that the bias instability (BI) of Mode II was significantly better than that of Mode I. After online compensation, the BI reached 0.23°/h, and the bias repeatability reached 3.15°/h at room temperature.

show abstract

“…A sixteen-sided cobweb-like disk resonator MEMS gyroscope was designed and fabricated [ 26 , 27 , 28 ]. The gyroscope consisted of 10 concentric sixteen-sided cobweb-like rings connected through eight alternating spokes to a single central anchor, as shown in Figure 2 .…”

Section: Mems Gyroscope Design and Fabricationmentioning

confidence: 99%

Real-Time Built-In Self-Test of MEMS Gyroscope Based on Quadrature Error Signal

Feng

Wang

Qiao³

et al. 2021

Micromachines

Self Cite

View full text Add to dashboard Cite

In high-reliability applications, the health condition of the MEMS gyroscope needs to be known in real time to ensure that the system does not fail due to the wrong output signal. Because the MEMS gyroscope self-test based on the principle of electrostatic force cannot be performed during the working state. We propose that by monitoring the quadrature error signal of the MEMS gyroscope in real time, an online self-test of the MEMS gyroscope can be realized. The correlation between the gyroscope’s quadrature error amplitude signal and the gyroscope scale factor and bias was theoretically analyzed. Based on the sixteen-sided cobweb-like MEMS gyroscope, the real-time built-in self-test (BIST) method of the MEMS gyroscope based on the quadrature error signal was verified. By artificially setting the control signal of the gyroscope to zero, we imitated several scenarios where the gyroscope malfunctioned. Moreover, a mechanical impact table was used to impact the gyroscope. After a 6000 g shock, the gyroscope scale factor, bias, and quadrature error amplitude changed by −1.02%, −5.76%, and −3.74%, respectively, compared to before the impact. The gyroscope failed after a 10,000 g impact, and the quadrature error amplitude changed −99.82% compared to before the impact. The experimental results show that, when the amplitude of the quadrature error signal seriously deviates from the original value, it can be determined that the gyroscope output signal is invalid.

show abstract

A Novel High-Symmetry Cobweb-Like Disk Resonator Gyroscope

Cited by 18 publications

References 28 publications

Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

Effect of Quadrature Control Mode on ZRO Drift of MEMS Gyroscope and Online Compensation Method

Real-Time Built-In Self-Test of MEMS Gyroscope Based on Quadrature Error Signal

Contact Info

Product

Resources

About