The three-dimensional integration technology based on TSV can greatly improve the miniaturization of passive components. In this paper, a three-dimensional substrate integrated waveguide (SIW) filter suitable for 105GHz-110GHz is proposed. By using the coupling matrix synthesis method, a SIW filter is proposed with good high frequency performance and small volume. The results show that, the center frequency is 107GHz, the insertion loss is less than 1.5dB, the return loss is more than 20dB, and its physical size is only 0.7028 × 1.2428mm 2