A Novel Inertial Microswitch With Dynamic Acceleration Band-Pass Characteristics

Zhu, Hengbo; Cao, Yun; Zhang, Xi; Nie, Weirong

doi:10.1109/led.2021.3079502

Cited by 5 publications

(4 citation statements)

References 10 publications

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“…It is believed that highly sensitive inertial microswitch with multi-threshold acceleration detection capability is able to overcome the severely damage derived from a mechanical impact and/or an electrical arcing in the solid-solid contact in typical micro-switches [29,30]. Moreover, the detection range of threshold acceleration from 500 g to 2000 g in 2.46 ms almost exceeds that of existing switches [2,11,20,21,[31][32][33], demonstrating the high sensitivity of the inertial switches in this paper.…”

Section: Multi-threshold Acceleration Of Inertial Micro-switchmentioning

confidence: 68%

Highly Sensitive Inertial Micro-Switch for Achieving Adjustable Multi-Threshold Acceleration

Deng

Song

2023

Actuators

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An inertial micro-switch with multi-threshold acceleration detection capability has been proposed, taking advantage of electromechanical coupling behavior. A mathematical model of electromechanical coupling behavior was established to display the dependence of highly sensitivity on pull-in characteristic and show the ability to detect threshold acceleration by controlling the voltage applied to the inertial micro-switch. The capability of sensitivity and detection that was described in mathematical model was implemented to occur at the inertial switch and showed agreement with that of a simulation. Inertia switches that were comprised of various microstructures with dimensions ranging 3.5 µm from 180 µm were manufactured by means of the micro-electro-mechanical system (MEMS) manufacturing process, and their functions were evaluated by a dropping system. The control method related to the manufacturing of inertial switches was obtained by analyzing the effect of the structural parameters of the inertial switch on threshold voltage and threshold acceleration, resulting in a relatively small error between simulation and experiment. The inertial micro-switch showed high sensitivity to achieving the pull-in effect at 30 V, sense multi-threshold acceleration ranging from 500 g to 2000 g in 2.46 ms and provided enough time for outputting the acceleration signal. Furthermore, the multi-threshold acceleration can be adjusted by controlling the voltage applied to inertial micro-switches. In addition, other functions of inertial micro-switches, such as lower residual stress, high recoverability, and repeatability, have been displayed.

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Section: Multi-threshold Acceleration Of Inertial Micro-switchmentioning

confidence: 68%

Highly Sensitive Inertial Micro-Switch for Achieving Adjustable Multi-Threshold Acceleration

Deng

Song

2023

Actuators

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“…Zhu et al [73,74] proposed a novel inertial switch with a specially designed filtering mechanism for realizing acceleration band-pass characteristics. The novel inertial switch can be triggered only when accelerated up to the load between the upper and lower cutoff threshold level, which is similar to the band-pass filter.…”

Section: Accepted Manuscriptmentioning

confidence: 99%

“…In SAD, the special switch should be in the on state under the launching acceleration 6000 g, but maintains off state under accidental collision loads of 12 000 g. It is evident that the normal acceleration threshold switch cannot meet this requirement. Zhu et al [30,31] proposed a novel inertial switch with a specially designed filtering mechanism for realizing acceleration band-pass characteristics. The novel inertial switch can be triggered only when accelerated up to the load between the upper and lower cut-off threshold level, which is similar to the band-pass filter.…”

Section: Application Of Safety and Arming Devicementioning

confidence: 99%

Micromachined threshold inertial switches: a review

Younis

2022

J. Micromech. Microeng.

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This paper presents a review of the recent advances on micromachined inertial switches/triggers. The review focuses on their advantages and disadvantages, sensitive directions, mechanisms of contact-enhancement, threshold accuracy, and the tunability of the acceleration threshold. Several applications of these sensors are highlighted including in healthcare, structural health monitoring, internet of things (IoT), and military. Recent contemporary research directions are also discussed, such as multi-directions/axis, multi-threshold sensors, and machine learning implementation. The article concludes with discussion on future development trends and performance improvements of inertial switches.

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“…Inertial switches based on micro-electromechanical systems (MEMS) technology have been widely used in civilian and military fields such as healthcare, video games, transportation, safety-and-arming systems, and the automotive field. This is due to their advantages of a small size, low cost, zero power in the untriggered state, and mass production 1 – 4 . The working principle of an inertial switch is as follows: the proof mass (i.e., movable electrode) quickly moves along the sensing direction and contacts the stationary electrode when the device is subjected to an acceleration beyond the threshold level, forming an external electrical circuit 5 .…”

Section: Introductionmentioning

confidence: 99%

Design, simulation, and testing of a tunable MEMS multi-threshold inertial switch

Xu,

Rocha,

Algoos

et al. 2024

Microsyst Nanoeng

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This paper presents a tunable multi-threshold micro-electromechanical inertial switch with adjustable threshold capability. The demonstrated device combines the advantages of accelerometers in providing quantitative acceleration measurements and g-threshold switches in saving power when in the inactive state upon experiencing acceleration below the thresholds. The designed proof-of-concept device with two thresholds consists of a cantilever microbeam and two stationary electrodes placed at different positions in the sensing direction. The adjustable threshold capability and the effect of the shock duration on the threshold acceleration are analytically investigated using a nonlinear beam model. Results are shown for the relationships among the applied bias voltage, the duration of shock impact, and the tunable threshold. The fabricated prototypes are tested using a shock-table system. The analytical results agree with the experimental results. The designed device concept is very promising for the classification of the shock and impact loads in transportation and healthcare applications.

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A Novel Inertial Microswitch With Dynamic Acceleration Band-Pass Characteristics

Cited by 5 publications

References 10 publications

Highly Sensitive Inertial Micro-Switch for Achieving Adjustable Multi-Threshold Acceleration

Highly Sensitive Inertial Micro-Switch for Achieving Adjustable Multi-Threshold Acceleration

Micromachined threshold inertial switches: a review

Design, simulation, and testing of a tunable MEMS multi-threshold inertial switch

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