“…22,24,27 In the equivalent circuit, R 0 is the contact ohmic The conductivity achieved is comparable to that of thin films prepared by sputtering, and the activation energy falls into the range of reported values of lithium niobate glasses. 31,33,35,36 The LNO thin films by ALD can provide a moderate ionic conductivity at room temperature, which is even higher than that of other similar amorphous systems developed by ALD such as lithium aluminum oxide, lithium tantalum oxide, and lithium phosphate. 21,22,24,27 This promises the possibility of the implementation of lithium niobium oxide thin films developed by ALD as a solid-state electrolyte in all-solid-state batteries.…”