1997
DOI: 10.1016/s0040-6090(96)09108-0
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A novel lithium conductor prepared by unbalanced magnetron r.f. sputtering

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Cited by 8 publications
(5 citation statements)
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“…22,24,27 In the equivalent circuit, R 0 is the contact ohmic The conductivity achieved is comparable to that of thin films prepared by sputtering, and the activation energy falls into the range of reported values of lithium niobate glasses. 31,33,35,36 The LNO thin films by ALD can provide a moderate ionic conductivity at room temperature, which is even higher than that of other similar amorphous systems developed by ALD such as lithium aluminum oxide, lithium tantalum oxide, and lithium phosphate. 21,22,24,27 This promises the possibility of the implementation of lithium niobium oxide thin films developed by ALD as a solid-state electrolyte in all-solid-state batteries.…”
Section: ■ Experimental Sectionmentioning
confidence: 97%
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“…22,24,27 In the equivalent circuit, R 0 is the contact ohmic The conductivity achieved is comparable to that of thin films prepared by sputtering, and the activation energy falls into the range of reported values of lithium niobate glasses. 31,33,35,36 The LNO thin films by ALD can provide a moderate ionic conductivity at room temperature, which is even higher than that of other similar amorphous systems developed by ALD such as lithium aluminum oxide, lithium tantalum oxide, and lithium phosphate. 21,22,24,27 This promises the possibility of the implementation of lithium niobium oxide thin films developed by ALD as a solid-state electrolyte in all-solid-state batteries.…”
Section: ■ Experimental Sectionmentioning
confidence: 97%
“…Apart from the aforementioned SSE materials, lithium niobate glasses have demonstrated good ionic conductivity. Lithium ions can move isotropically in the randomly cross-linked glass networks, giving a conductivity of 10 –5 –10 –9 S cm –1 under different synthesis conditions. In addition, lithium niobates have been proven to be excellent interface materials for ASSBs. , In this work, we realize lithium niobium oxide (LNO) thin film deposition with lithium tert -butoxide (LiO t Bu) as the Li source and niobium ethoxide [Nb­(OEt) 5 ] as the Nb source. Different ratios of Li to Nb subcycles presented thin films with different stoichiometries.…”
Section: Introductionmentioning
confidence: 99%
“…Most of the oxide-based electrolytes produced by the conventional physical vapour deposition method showed smaller or comparable ionic conductivity and poor electrochemical stability relative to LiPON. 19,65,[282][283][284] At the same time, sulphide-based electrolytes, having a promising ionic conductivity that is much closer to liquid electrolytes, are less favourable due to hygroscopic nature and chemical instability in the air. 19,285 Therefore, the number of reported studies on these materials is limited up to now.…”
Section: Other Glass Electrolytesmentioning
confidence: 99%
“…The thicknesses of the SE and CL are set to 100 µm and 10 nm thickness, respectively, representative of typical dimensions in SSBs. The 𝜎 Li + of the CL is set to 1.0 × 10 -6 S/cm, which is 1/500 of that in the SE, as the 𝜎 Li + of most CL materials is lower than that of SEs 31,[33][34][35] . Under such conditions, as illustrated in Fig.…”
Section: Optimization Of 𝝈 𝐞𝐥𝐞 Of a CL With Predetermined Thicknessmentioning
confidence: 99%
“…However, design guidelines for the CLs for SSBs have not yet been fully established. From the perspective of battery performance, a thin CL of several tens of nanometers is preferred because many candidate materials for CL possess low ionic and/or electronic conductivity [31][32][33][34][35][36][37][38][39] . On the contrary, CLs are required to afford enduring protection to the SE.…”
Section: Introductionmentioning
confidence: 99%