2001
DOI: 10.1149/1.1409400
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A Novel Method of Etching Copper Oxide Using Acetic Acid

Abstract: The removal of copper oxide using acetic acid at low temperatures was investigated. Acetic acid removes a variety of copper oxides, including cuprous oxide, cupric oxide, and cupric hydroxide without attacking the underlying copper film. The removal of these oxides was determined by X-ray photoelectron spectroscopy. Acetic acid can tolerate up to 4 vol % water dilution without hindering the oxide removal while producing an oxide-free surface. However, if a deionized water rinse is performed after an acetic aci… Show more

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Cited by 253 publications
(200 citation statements)
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“…21 CVD using conventional copper foil catalysts normally involves removal of the native oxide prior to graphene growth, for examplem by treatment with acetic acid 21 or (NH 4 ) 2 S 2 O 8 . By contrast, the peeled-off catalyst surface is formed in a chemically pure state and only begins to oxidize slowly upon exposure to air.…”
Section: Articlementioning
confidence: 99%
“…21 CVD using conventional copper foil catalysts normally involves removal of the native oxide prior to graphene growth, for examplem by treatment with acetic acid 21 or (NH 4 ) 2 S 2 O 8 . By contrast, the peeled-off catalyst surface is formed in a chemically pure state and only begins to oxidize slowly upon exposure to air.…”
Section: Articlementioning
confidence: 99%
“…Their presence was also identified using the Auger electron peaks (Cu LMM). 29,30 The amount of Cu 2 O relative to Cu 0 was greater after desmutting with added CeCl 3 and CeCl 3 + H 2 O 2 than with nitric acid alone (Table III).…”
Section: Resultsmentioning
confidence: 96%
“…In addition to the peak at 932.9 eV, the Cu 2p 3/2 spectra recorded for the deposits formed at 0.00 and À0.10 V vs SCE showed peaks at 935.1 and 934.9 eV, respectively, which are typical of Cu(OH) 2 with its corresponding satellite peaks. 42 Considering that XPS probes the top 10 nm of the sample surface, a very thin layer of Cu(OH) 2 must be present on the deposits surface. The Cu 2p 3/2 signals observed from the deposits formed at 0.00 and À0.10 V are nearly identical to those reported by Yin et al for Cu 2 O nanocrystals.…”
Section: ' Introductionmentioning
confidence: 99%