“…Therefore, piezoelectric driving technology is widely used in precision systems including micro/nanoindentation, scratch testing, optical focusing, and micro-robots (Jalili et al, 2016; Oubellil et al, 2019; Qiu and Piyawattanametha, 2019; Ren and Zou, 2014). Based on different driving principles, piezoelectric actuators can be divided into four categories: stick-slip, inchworm, ultrasonic, and direct drive (Jeong et al, 2013; Liaw and Shirinzadeh, 2011; Liu et al, 2017, 2018a, 2018b; Neuman et al, 2015; Tian et al, 2020; Wang et al, 2019a, 2019b). The stick-slip actuator attracted considerable attention from researchers due to its small size, high resolution, and simple control.…”