A novel process for fabrication of SnO2-based thick film gas sensors

Lee, Sora; Lee, Gyeong-Geun; Kim, Joosun; Kang, Suk–Joong L.

doi:10.1016/j.snb.2006.08.029

Cited by 14 publications

(6 citation statements)

References 9 publications

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“…The addition of subsequent layers had little effect on sensor performance. These observations were repeated with other sensors and are consistent with results by Lee et al [ 7 ].…”

Section: Resultssupporting

confidence: 92%

“…That leaves the physical addition of the second layer to be the primary driver for the observed improvement in performance. The second layer could provide a denser network of interconnected particles compared to the single film layer [ 7 ]. A denser network may not affect diffusion as long as the pore sizes are still sufficiently large for the target gases to freely flow into the film.…”

Section: Resultsmentioning

confidence: 99%

“…Earlier research has shown that binders can provide better film rigidity, and they can improve sensor response by lowering the absolute film resistance [ 20 ]. The three binder paste recipes used in this work are listed in Table 1 and were adopted from screen-printing and porous plug fabrication approaches suggested by Lee et al [ 7 ] and Ihokura et al . [ 21 ].…”

Section: Methodsmentioning

confidence: 99%

“…Binders are commonly employed to deposit tin dioxide films to improve the mechanical strength of the film. Such binders have noticeable interactions with sensor performance, especially when used with organic vehicles [ 7 , 11 , 12 ]. Along with other factors such as film processing (e.g., heat treating) and film imperfections, the film deposition process itself can modify the sensor response sufficiently to mask the influence of material properties [ 5 , 13 – 16 ].…”

Section: Introductionmentioning

confidence: 99%

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The Effects of Two Thick Film Deposition Methods on Tin Dioxide Gas Sensor Performance

Bakrania

Wooldridge

2009

Sensors

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This work demonstrates the variability in performance between SnO2 thick film gas sensors prepared using two types of film deposition methods. SnO2 powders were deposited on sensor platforms with and without the use of binders. Three commonly utilized binder recipes were investigated, and a new binder-less deposition procedure was developed and characterized. The binder recipes yielded sensors with poor film uniformity and poor structural integrity, compared to the binder-less deposition method. Sensor performance at a fixed operating temperature of 330 °C for the different film deposition methods was evaluated by exposure to 500 ppm of the target gas carbon monoxide. A consequence of the poor film structure, large variability and poor signal properties were observed with the sensors fabricated using binders. Specifically, the sensors created using the binder recipes yielded sensor responses that varied widely (e.g., S = 5 – 20), often with hysteresis in the sensor signal. Repeatable and high quality performance was observed for the sensors prepared using the binder-less dispersion-drop method with good sensor response upon exposure to 500 ppm CO (S = 4.0) at an operating temperature of 330 °C, low standard deviation to the sensor response (±0.35) and no signal hysteresis.

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“…The addition of subsequent layers had little effect on sensor performance. These observations were repeated with other sensors and are consistent with results by Lee et al [ 7 ].…”

Section: Resultssupporting

confidence: 92%

Section: Resultsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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The Effects of Two Thick Film Deposition Methods on Tin Dioxide Gas Sensor Performance

Bakrania

Wooldridge

2009

Sensors

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“…Thick-fi lm technologies include such methods as spray deposition, dip coating, drop coating, centrifugal coating, conformal coverage with thermoplastic transfer molding, and screen printing Lee et al 2007b ) . A short description of these methods is presented in Table 28.1 .…”

Section: General Descriptionmentioning

confidence: 99%

Technologies Suitable for Gas Sensor Fabrication

Korotcenkov

2013

Integrated Analytical Systems

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in gas sensors is one of the most important tasks of modern materials science. As shown in previous chapters, materials used in gas sensors need to ful fi ll a range of requirements related to the crystallographic structure, chemical composition, electrophysical properties, catalytic activity, and so on. These materials also show a great deal of variation. Materials for gas sensors can come in a variety of forms, including fi lms, ceramics, or powders. Their structure may be amorphous, glassy, nanocrystalline, polycrystalline, single crystalline, or epitaxial. They may be either dense or porous. These materials may be elementary substances, complex compounds, or composites. Polymers, metals, dielectrics, and semiconductors can also be used as materials for chemical sensors. They may be either organic or inorganic in nature.This vast amount of variation indicates that it is impossible to produce such a wide range of materials using just one method. The possible differences in the physical-chemical properties of the materials are too great; so too are the resulting differences in the conditions required for the synthesis and deposition of these materials. Therefore, for preparing gas sensor materials with required properties we have to use various methods (see Fig. 28.1 ). These techniques differ in deposition rates, substrate temperature during deposition, precursor materials, the necessary equipment, expenditure, and the quality of the resulting fi lms. A short account of these methods is presented in Table 28.1 . One can fi nd more detailed analysis of these methods in a vast array of quality reviews devoted to the subject (Brinker and Scherer 1990 ; It is clear that the selection of a method acceptable for sensor material synthesis or deposition during sensor design and fabrication is a complicated task, and we need to analyze many different factors, including the type of technology which will be used for sensor fabrication: ceramic, thick-fi lm, or thin-fi lm technologies. Of course, every technology has advantages and disadvantages. Tables 28.2 and 28.3 present a comparison of several of these methods. Limitations of technology based on the use of 1D nanomaterials (nanowires, nanotubes, etc.) were discussed in

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Materials for Thick Film Technology

Korotcenkov

2013

Integrated Analytical Systems

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A novel process for fabrication of SnO2-based thick film gas sensors

Cited by 14 publications

References 9 publications

The Effects of Two Thick Film Deposition Methods on Tin Dioxide Gas Sensor Performance

The Effects of Two Thick Film Deposition Methods on Tin Dioxide Gas Sensor Performance

Technologies Suitable for Gas Sensor Fabrication

Materials for Thick Film Technology

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