All-nonmetal resistive random access memory (RRAM) with a n + -Si/Sin x /p + -Si structure was investigated in this study. the device performance of Sin x developed using physical vapor deposition (PVD) was significantly better than that of a device fabricated using plasma-enhanced chemical vapor deposition (pecVD). the Sin x RRAM device developed using pVD has a large resistance window that is larger than 10 4 and exhibits good endurance to 10 5 cycles under switching pulses of 1 μs and a retention time of 10 4 s at 85 °C. Moreover, the SiN x RRAM device developed using pVD had tighter device-todevice distribution of set and reset voltages than those developed using pecVD. Such tight distribution is crucial to realise a large-size cross-point array and integrate with complementary metal-oxidesemiconductor technology to realise electronic neurons. the high performance of the Sin x RRAM device developed using pVD is attributed to the abundant defects in the pVD dielectric that was supported by the analysed conduction mechanisms obtained from the measured current-voltage characteristics.Resistive random access memory (RRAM) 1-26 has attracted considerable attention over the past two decades due to its simple structure, nonvolatility, high scalability, rapid switching speed, and relatively low operating power. These advantages make RRAM devices suitable for use in future artificial intelligence and neuromorphic computing applications 1-4 . A variety of binary composite materials, such as HfO x , TaO x , TiO x , SiO x , and GeO x , that exhibit different device properties have been used as the switching layer. Although various conduction mechanisms for RRAMs have been proposed, the carrier transport behaviour of RRAMs still has not been completely confirmed. To prevent the metal ions from contributing to transport behaviour, we pioneered nonmetal GeO x dielectric RRAM devices 6-10 and all-nonmetal N + -Si/SiO x /P + -Si RRAM devices 11 . In this study, we investigated the all-nonmetal SiN x RRAM devices in which the bond enthalpy of SiN is lower than that of SiO 27 . The SiN x material has been widely used in the semiconductor industry for various applications, such as the passivation layer of an integrated circuit and the charge-trapping layer of a flash memory. This material can be easily integrated into complementary metal-oxide-semiconductor (CMOS) technology. Moreover, the RRAM device performance strongly depends on the SiN x formation process. A high-performance RRAM device with a large memory window, good endurance, long retention time, and tight device-to-device distribution of the set-reset voltages V set -V reset is only achievable when the SiN x layers are formed using low-temperature physical vapor deposition (PVD) rather than the standard plasma-enhanced chemical vapor deposition (PECVD). The high-performance SiN x RRAM device developed using PVD (PVD-SiN x RRAM device) is linked to the high number of defects and high amount of defect-related current conduction in the SiN x dielectric.