Abstract:To successfully exploit the full potential of piezoelectric actuators in micro/nano positioning systems, it is essential to model their hysteresis behavior accurately. A novel hysteresis model for piezoelectric actuator is proposed in this paper. Firstly, segment-similarity, which describes the similarity relationship between hysteresis curve segments with different turning points, is proposed. Time-scale similarity, which describes the similarity relationship between hysteresis curves with different rates, is used to solve the problem of dynamic effect. The proposed model is formulated using these similarities. Finally, the experiments are performed with respect to a micro/nano-meter movement platform system. The effectiveness of the proposed model is verified as compared with the Preisach model. The experimental results show that the proposed model is able to precisely predict the hysteresis trajectories of piezoelectric actuators and performs better than the Preisach model.