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Hysteresis behavior of piezoelectric actuators degrades the accuracy and performance of the micro or nano positioning stage. As a remedy to this problem, a hysteresis model and a compensator based on time series similarity are proposed in this article. To generate this dynamic hysteresis model, geometric and time scale similarity of output displacement time series of piezoelectric actuators are studied. Furthermore, to compensate for hysteresis behavior, an inverse model based on time series similarity and an inverse model-based feedforward compensator are proposed. This novel modelbased compensator is validated against the Prandtl-Ishlinskii model-based one and is assessed for effectiveness and practicality.

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A fast low-cost analog amplifier suitable for driving piezoelectric actuator is proposed. The amplifier is mainly made up of a low-voltage amplifier and some high-power transistors. The circuit makes fully use of the respective advantages of high stability of low-voltage operational amplifier and high power of discrete component. The simulation results of the whole power amplifier indicate that the power amplifier designed could excellently accomplish the high-voltage magnification with high linearity and relatively high bandwidth. And the principle and performance of the circuit are presented.