1998
DOI: 10.1016/s0924-4247(98)00021-1
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A novel tactile sensor system for heavy-load applications based on an integrated capacitive pressure sensor

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Cited by 30 publications
(14 citation statements)
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“…Many different approaches have been proposed to fabricate these sensors, most of them are based on piezoresistive (Engel et al 2006; Kane et al 2000;Mei et al 2000;Lomas et al 2004;Kim et al 2006;Wisitsoraat et al 2007; Shan et al 2005) or capacitive (Salo et al 2003;Leineweber et al 2000;Paschen et al 1998;Gray and Fearing 1996;Lee et al 2006; http://pressureprofile.com/products-robotouch) principles, and a few are based on optical (Hellard and Russell 2006) or piezoelectrical transduction (Dahiya et al 2007). Most of these sensors are made using technologies for Micro-ElectroMechanical Systems (MEMS) on silicon (Kane et al 2000;Lomas et al 2004; Salo et al 2003) or on polymers (Engel et al 2006;Kim et al 2006; Lee et al 2006).…”
Section: Introductionmentioning
confidence: 99%
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“…Many different approaches have been proposed to fabricate these sensors, most of them are based on piezoresistive (Engel et al 2006; Kane et al 2000;Mei et al 2000;Lomas et al 2004;Kim et al 2006;Wisitsoraat et al 2007; Shan et al 2005) or capacitive (Salo et al 2003;Leineweber et al 2000;Paschen et al 1998;Gray and Fearing 1996;Lee et al 2006; http://pressureprofile.com/products-robotouch) principles, and a few are based on optical (Hellard and Russell 2006) or piezoelectrical transduction (Dahiya et al 2007). Most of these sensors are made using technologies for Micro-ElectroMechanical Systems (MEMS) on silicon (Kane et al 2000;Lomas et al 2004; Salo et al 2003) or on polymers (Engel et al 2006;Kim et al 2006; Lee et al 2006).…”
Section: Introductionmentioning
confidence: 99%
“…Sensors that cover larger areas and have also wider input ranges can be obtained by arranging single force sensors on a -usually-flexible substrate (Mei et al 2000; Shan et al 2005; Paschen et al 1998), but this increases costs because many instances of these force sensors are needed and because they must be assembled on the substrate. To lower the cost of the sensor it is better to obtain the whole array in the batch fabrication process minimizing further assembly of separate components.…”
Section: Introductionmentioning
confidence: 99%
“…͑v͒ Capacitive sensors [6][7][8][9] have a nonlinear behavior, could be assembled in a matrix to measure static force distributions, but have limited dynamic response.…”
Section: Introductionmentioning
confidence: 99%
“…Some implement the signal conditioning circuitry in the same substrate [10] [11], which is a first step to reduce the errors and easy the reading of dense arrays. This first step is possible due to technologies that allow the implementation of the sensor and the circuitry in the same substrate.…”
Section: Introductionmentioning
confidence: 99%