2016
DOI: 10.3938/jkps.69.691
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A novel two-axis parallel-kinematic high-speed piezoelectric scanner for atomic force microscopy

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“…Fortunately, there have been many improvements in the imaging speeds of AFM, especially in the past decade. Several technological hurdles should be overcome to improve imaging speeds, and these include the slow data acquisition systems [ 235 , 236 ], low resonant frequency of the nano-positioners and scanners [ 234 , 237 , 238 ], low bandwidth of the feedback controller [ 234 , 237 ], and low resonant frequency of the microcantilevers [ 235 , 236 , 239 , 240 ]. An effective means to excite the microcantilevers in the MHz regime is also needed.…”
Section: High-speed Imagingmentioning
confidence: 99%
“…Fortunately, there have been many improvements in the imaging speeds of AFM, especially in the past decade. Several technological hurdles should be overcome to improve imaging speeds, and these include the slow data acquisition systems [ 235 , 236 ], low resonant frequency of the nano-positioners and scanners [ 234 , 237 , 238 ], low bandwidth of the feedback controller [ 234 , 237 ], and low resonant frequency of the microcantilevers [ 235 , 236 , 239 , 240 ]. An effective means to excite the microcantilevers in the MHz regime is also needed.…”
Section: High-speed Imagingmentioning
confidence: 99%