2010
DOI: 10.1109/tbme.2010.2052617
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A PDMS-Based Conical-Well Microelectrode Array for Surface Stimulation and Recording of Neural Tissues

Abstract: A method for fabricating polydimethylsiloxane (PDMS)-based microelectrode arrays (MEAs) featuring novel conical-well microelectrodes is described. The fabrication technique is reliable and efficient, and facilitates controllability over both the depth and the slope of the conical wells. Because of the high PDMS elasticity (as compared to other MEA substrate materials), this type of compliant MEA is promising for acute and chronic implantation in applications that benefit from conformable device contact with bi… Show more

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Cited by 36 publications
(23 citation statements)
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“…Electrode material with a flexibility closer to that of brain tissues can reduce neural damage and inflammatory response. Many flexible polymers have been used to make neural electrode, including polyimide [ 182 , 183 ], parylene [ 184 ], PDMS [ 185 ] etc. Biocompatibility is always an important issue in electrode design because inflammatory response and encapsulation deteriorate signal quality over time and undermine the quality of chronic neural recordings.…”
Section: Main Textmentioning
confidence: 99%
“…Electrode material with a flexibility closer to that of brain tissues can reduce neural damage and inflammatory response. Many flexible polymers have been used to make neural electrode, including polyimide [ 182 , 183 ], parylene [ 184 ], PDMS [ 185 ] etc. Biocompatibility is always an important issue in electrode design because inflammatory response and encapsulation deteriorate signal quality over time and undermine the quality of chronic neural recordings.…”
Section: Main Textmentioning
confidence: 99%
“…Additionally, molds for materials that are deposited by means of CVD are difficult to separate, and may require the use of adhesion-promoting or adhesion-demoting techniques to [ 67 ] help decouple the mold from the substrate. Molding is routinely used in the fabrication of non-penetrating arrays that lie on the surface of the target tissue, such as electrocorticography [ 69 ], spinal cord stimulation [ 70 ], and retinal prosthesis [ 71 ]. However, for neural probes, molding is most often relegated for coating devices with stiffeners or biologically-inspired chemicals, rather than for use in the fabrication of critical features.…”
Section: Probe Fabrication and Materials Selectionmentioning
confidence: 99%
“…PDMS is a Si based organic polymer widely used in micro fabrication and device encapsulation. Its bio-compatibility, high chemical inertness, as long as its mechanical property—flexible, but sturdy enough to tolerate bending across macroscopic scales, make it a very suitable and safe material [24] . Even for the transdermal drug delivery where the device is attached to the skin and there is less space restriction and less bio-safety consideration, the antenna-PDMS packaging assembly is still an advantageous solution.…”
Section: Low Cost Fabrication Of Antenna Sensorsmentioning
confidence: 99%