As complementary metal-oxide-semiconductor (CMOS) scaling down to sub-10 nm node, emerging technology to reduce power consumption enforced by shortchannel effects is actively pursued. [1] At single transistor level, the most effective way is to reduce operating voltage (V DD ) and subthreshold slope (SS). [2] However, SS in metal-oxide-semiconductor fieldeffect transistors (MOSFETs) is limited to 60 mV dec −1 at room temperature due to thermionic emission of carriers in the Boltzmann tail. To this end, novel concepts are proposed to design steep-slope transistors, including tunnel FET (TFET), [3] impact ionization MOS (IMOS), [4] and nanoelectromechanical FET (NEM-FET). [5] While achieving steep slope, these new device concepts sacrifice other aspects. TFETs utilize the band-to-band tunneling current and suffer from low on-state current. The IMOS needs very large bias voltage to drive impact ionization and has stability issues. For NEM-FET, speed is limited to MHz due to the moving of heavy mass. Recently, negative capacitance (NC) effect in an FE/dielectric gate stack is proposed as a possible solution to break the 60 mV dec −1 limitation. [6][7][8][9][10][11][12] HfO 2 -based FE materials are particularly attractive because of: 1) excellent CMOS-compatibility by atomic layer deposition (ALD), [13,14] 2) scalability to ultrathin thickness, [15] 3) no sacrifice of I on , [8] and 4) potential GHz operation. [16] In the original Landau-Ginzburg-Devonshire (LGD) theory, a ferroelectric below its Curie temperature is described by a doublewell free energy landscape. The two degenerate energy minima define two stable spontaneous polarization states, which can be programmed by the application of electric field. The minima of energy states are separated by a metastable region where the second-order differential of energy versus polarization is negative, defining a region of negative capacitance. [6] It has been proposed to stabilize the metastable negative capacitance region by serially adding a dielectric (DE) with parabolic energy landscape, the so-called capacitance matching. [17,18] The Landau-Khalatnikov (L-K) model shows that such quasistatic NC can theoretically give rise to sub-60 mV dec −1 switching without hysteresis in logic devices. [19] However, so far, the experimental observation of negative capacitance still cannot be fully explained by L-K model. The negative capacitance (NC) effect in ferroelectric materials provides a possible solution to break the Boltzmann tyranny and realize steep-slope field-effect transistors (FETs) with sub-60 mV dec −1 subthreshold slope (SS). HfO 2 -based ferroelectrics (FE) have attracted great attention as dielectric candidates for NCFETs due to their excellent scalability and compatibility with complementary metal-oxide-semiconductor technology. However, understanding of the ferroelectric properties of HfO 2 -based FEs, especially at reduced thickness, is still at an early stage. The quasistatic polarization relaxation behavior of ferroelectric Hf x Zr 1−x O 2 (HZO) thin fil...