A Petri Net Method for Schedulability and Scheduling Problems in Single-Arm Cluster Tools With Wafer Residency Time Constraints

Wu, Naiqi; Chen, Chu; Chu, Feng; Zhou, Meng Chu

doi:10.1109/tsm.2008.2000425

Cited by 207 publications

(127 citation statements)

References 27 publications

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“…The symbols and explanation are summarized in Table 1. From the above analysis, for a single-arm cluster tool with wafer revisiting and residency time constraints, according to Wu et al 24,29 we have the following schedulability definition. Definition 2.5.…”

Section: Task Time Modelingmentioning

confidence: 99%

“…Note that h 1 is constant and known in advance and v 0-4 in h 2 should be determined by a schedule. Based on the fact that the cycle time of the entire system must be equal to the robot cycle time, 24 with the robot cycle time obtained, we can analyze the wafer sojourn time at each step. It follows from the above analysis that the wafer sojourn time at Step 1 is equal to the robot cycle time minus the time taken for performing s 1 and the time for firing s 12 , t 12 , and s 21 in s 7 , that is, we have…”

Section: Cycle Time Analysismentioning

confidence: 99%

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Petri net-based scheduling of time constrained single-arm cluster tools with wafer revisiting

Liu

Yang

2016

Advances in Mechanical Engineering

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It is very difficult to schedule a single-arm cluster tool with wafer revisiting such that wafer residency time constraints are satisfied. This article conducts a study on this challenging problem for a single-arm cluster tool with atomic layer deposition process. With a so-called p-backward strategy being applied, a Petri net model is developed to describe the dynamic behavior of the system. Based on the model, the existence of a feasible schedule is analyzed, schedulability conditions are derived, and scheduling algorithms are presented if there is a schedule. A schedule is obtained by simply setting the robot waiting time if schedulable, and it is very computationally efficient. The obtained schedule is shown to be optimal. Illustrative examples are given to demonstrate the proposed approach.

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Section: Task Time Modelingmentioning

confidence: 99%

Section: Cycle Time Analysismentioning

confidence: 99%

Petri net-based scheduling of time constrained single-arm cluster tools with wafer revisiting

Liu

Yang

2016

Advances in Mechanical Engineering

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“…The scheduling a control of robots in cluster-tools dedicated to the semiconductor industry has been deeply studied in the last decade [21,29]. The TEG considered in this example, see Figure 6, is a simplifyed instance of a model given by Wu et al [29] that represents the behaviour of a single armed robot in a (2,1) schedule of a cluster-tool.…”

Section: Remark 1 We Havementioning

confidence: 99%

“…The TEG considered in this example, see Figure 6, is a simplifyed instance of a model given by Wu et al [29] that represents the behaviour of a single armed robot in a (2,1) schedule of a cluster-tool. Briefly, a cluster-tool dedicated to semiconductor industry is a set of processing modules (PM) where a chemeical or a thermal treatment is applied to a waffer.…”

Section: Remark 1 We Havementioning

confidence: 99%

Control of discrete event systems with respect to strict duration: Supervision of an industrial manufacturing plant

Atto

Martínez

Amari

2011

Computers & Industrial Engineering

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In this paper, we propose a (max, +)-based method for the supervision of discrete event systems subject to tight time constraints. Systems under consideration are those modelled as timed event graphs and represented with linear (max, +) state equations. The supervision is addressed by looking for solutions of constrained state equations associated with timed event graph models. These constrained state equations are derived by reducing duration constraints to elementary constraints whose contributions are injected in the system's state equations. An example for supervisor synthesis is given for an industrial manufacturing plant subject to a strict temporal constraint, the thermal treatment of rubber parts for the automotive industries. Supervisors are calculated and classified according to their performance, considering their impact on the production throughput.

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“…The robotic scheduling problem with fixed processing times, a special case of the problem with time window constraints attracts the interests of many researchers (see Levner et al 1997, Kats et al 1999, Che et al 2002, Che and Chu 2004, 2008, Chu 2006, and Kats and Levner 2009. They all applied an efficient method called the method of prohibited intervals (MPI) to formulate the problem and developed several polynomial algorithms based on the mathematical analysis of the models.…”

Section: Introductionmentioning

confidence: 99%

A branch and bound algorithm for optimal cyclic scheduling in a robotic cell with processing time windows

Yan

Chen

Yang

et al. 2009

International Journal of Production Research

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A branch and bound algorithm is described for optimal cyclic scheduling in a robotic cell with processing time windows. The objective is to minimise the cycle time by determining the exact processing time on each machine which is limited within a time window. The problem is formulated as a set of prohibited intervals of the cycle time, which is usually applied in the robotic cyclic scheduling problem with fixed processing times. Since both bounds of these prohibited intervals are linear expressions of the processing times, we divide these prohibited intervals into a series of the subsets and transform the problem into enumerating the nonprohibited intervals of cycle time in each subset. This enumeration procedure is completed by an efficient branch and bound algorithm, which could find an optimal solution by enumerating partial non-prohibited intervals. Computational results on the benchmark instances and randomly generated test instances indicate that the algorithm is effective.

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A Petri Net Method for Schedulability and Scheduling Problems in Single-Arm Cluster Tools With Wafer Residency Time Constraints

Cited by 207 publications

References 27 publications

Petri net-based scheduling of time constrained single-arm cluster tools with wafer revisiting

Petri net-based scheduling of time constrained single-arm cluster tools with wafer revisiting

Control of discrete event systems with respect to strict duration: Supervision of an industrial manufacturing plant

A branch and bound algorithm for optimal cyclic scheduling in a robotic cell with processing time windows

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