2021
DOI: 10.1109/tmtt.2021.3121692
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A Photogenerated Silicon Plasma Waveguide Switch and Variable Attenuator for Millimeter-Wave Applications

Abstract: This paper reports the design, fabrication, and measurement of a millimeter-wave solid-state π-match waveguide switch using bulk silicon micromachining. A photogenerated plasma within a silicon post is utilized as the switching element within the waveguide channel. Not only does this isolate the switch bias network from the RF signal path, but allows for tuning of the OFF-state isolation with increasing optical power for application as a variable attenuator. A measured OFF-state isolation greater than 25 dB up… Show more

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Cited by 11 publications
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