Static and dynamic power for strained-Si device is analyzed and compared with conventional bulk-Si technology. Optimum device design points are suggested with controlling physical/structural device parameters. Strained-Si CMOS circuits are studied, showing substantially-reduced power consumptions due to unique advantageous features of strainedSi device. The trade-offs for power and performance in strained-Si devices/circuits are discussed. Further, analysis and low-power design points are applied and extended to strained Si on SOI substrate (SSOI) CMOS technology.