A piezoelectric micro-electro-mechanical system vector sensor with a mushroom-shaped proof mass for a dipole beam pattern

Yeon, Ara; Yeo, Hong Goo; Roh, Yongrae; Kim, Kyungseop; Seo, Hee-Seon; Choi, Hongsoo

doi:10.1016/j.sna.2021.113129

Cited by 16 publications

(1 citation statement)

References 46 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…With the revolutionary changes in many fields, such as manufacturing, materials, information, biology, medicine, and national defense, caused by the wave of micro/nanotechnologies, compliant mechanisms have been widely used in the fields of micro/nano operations [1,2], nano-positioning stages [3,4], fast tool servos (FTSs) [5][6][7], and micro-electro-mechanical systems (MEMSs) [8,9]. Therefore, it is important to advance the development of the fundamental theory of compliant mechanisms and explore efficient design methods.…”

Section: Introductionmentioning

confidence: 99%

Topology Optimization of Compliant Mechanisms Considering Manufacturing Uncertainty, Fatigue, and Static Failure Constraints

Zhao,

Wang

2023

Processes

View full text Add to dashboard Cite

This study presents a new robust formulation for the topology optimization of compliant mechanisms, addressing the design challenges while considering manufacturability, static strength, and fatigue failure. A three-field density projection is implemented to control the minimum size of both real-phase and null-phase material structures to meet the manufacturing process requirements. The static strength is evaluated via the sum of the amplitude and the mean absolute value of the signed von Mises stress. The fatigue failure is solved via the modified Goodman criterion. The real output displacement is optimized by adding artificial springs to the prescribed value. This approach is implemented based on an improved solid isotropic material with penalization (SIMP) interpolation method to describe and solve the optimization model and derive the shape sensitivity of the optimization problem. Finally, two numerical examples are applied to illustrate the effectiveness of the presented method.

show abstract

Section: Introductionmentioning

confidence: 99%

Topology Optimization of Compliant Mechanisms Considering Manufacturing Uncertainty, Fatigue, and Static Failure Constraints

Zhao,

Wang

2023

Processes

View full text Add to dashboard Cite

show abstract

Bionic MEMS for Touching and Hearing Sensations: Recent Progress, Challenges, and Solutions

Cretu

2022

J Bionic Eng

View full text Add to dashboard Cite

Piezoelectric Field Effect Transistors (Piezo-FETs) for Bionic MEMS Sensors: A Literature Review

Ge,

Chen

2024

J Bionic Eng

View full text Add to dashboard Cite

A piezoelectric micro-electro-mechanical system vector sensor with a mushroom-shaped proof mass for a dipole beam pattern

Cited by 16 publications

References 46 publications

Topology Optimization of Compliant Mechanisms Considering Manufacturing Uncertainty, Fatigue, and Static Failure Constraints

Topology Optimization of Compliant Mechanisms Considering Manufacturing Uncertainty, Fatigue, and Static Failure Constraints

Bionic MEMS for Touching and Hearing Sensations: Recent Progress, Challenges, and Solutions

Piezoelectric Field Effect Transistors (Piezo-FETs) for Bionic MEMS Sensors: A Literature Review

Contact Info

Product

Resources

About