A piezoelectric micropump with an integrated sensor based on space-division multiplexing

Zhang, Zhonghua; Kan, Junwu; Cheng, Guangming; Wang, Hongyun; Jiang, Yonghua

doi:10.1016/j.sna.2013.08.027

Cited by 50 publications

(30 citation statements)

References 22 publications

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“…Literature survey shows that there are many studies about the piezoelectric actuated diaphragm micropumps. For example, Zhang et al (2013a) in other studies, a single piezoelectric diaphragm micropump was fabricated and used check valves in the entrance and exit of the chamber. In the presented study, the effects of voltages and frequencies that cause flow rate changes on the micropump were investigated.…”

Section: Introductionmentioning

confidence: 99%

Performance Comparison of Novel Single and Bi-Diaphragm PZT Based Valveless Micropumps

Dereshgi¹,

Yıldız²,

Parlak³

2020

JAFM

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A commercial micropump should provide properties that justify the simple structure and miniaturization, high reliability, simple working principle, low cost and no need for complex controller. In this study, two novel piezoelectric actuated (lead zirconate titanate-PZT) valveless micropumps that can achieve high flow rates by pumping chambers and fixed reservoirs were designed and fabricated. Extensive experiments were conducted to investigate the effects of hydrodynamic and electromechanical on flow rates of the Single Diaphragm Micropump (SDM) and the Bi-diaphragm Micropump (BDM). BDM had two actuators facing to the same chamber at 180-degree phase shift. The primary features of the proposed designs were the high flow rates at low driving voltages and frequencies with the help of innovative design geometry. 3D-printing technique providing one-step fabrication for integrated micropumps with fixed reservoir was used. The micropump materials were biocompatible and can be used repeatedly to reduce costs. Mechanical parameters such as tensile test for silicon diaphragm, surface topography scanning by microscopy techniques and drop shape analysis for hydrophobic property were investigated to reveal surface wetting and flow stability. In addition, the effect of reservoir height was investigated and the calibration flow rates were measured during the inactive periods. The maximum diaphragm displacements were obtained at 45 V and 5 Hz. The maximum flow rate of SDM and BDM at 45 V and 20 Hz were 32.85 ml/min and 35.4 ml/min respectively. At all driving voltage and frequency levels, BDM had higher flow rates than of SDM.

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Section: Introductionmentioning

confidence: 99%

Performance Comparison of Novel Single and Bi-Diaphragm PZT Based Valveless Micropumps

Dereshgi¹,

Yıldız²,

Parlak³

2020

JAFM

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show abstract

“…Although most micropumps have complex structures and a high level of power consumption, piezoelectric actuation has the advantages of a relatively simple structure, short response time and relatively low power consumption [3,9,10]. Typically, piezoelectrically-actuated pumps use a piezoelectric actuator to move a membrane in a chamber providing fluid delivery with the flow direction being controlled by check valves [11,12]. Applications can be found from micro-dosing drug administration to propelling microspacecraft [13,14,15,16,17].…”

Section: Introductionmentioning

confidence: 99%

Development and Characterization a Single-Active-Chamber Piezoelectric Membrane Pump with Multiple Passive Check Valves

Zhang

Feng

et al. 2016

Sensors

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In order to prevent the backward flow of piezoelectric pumps, this paper presents a single-active-chamber piezoelectric membrane pump with multiple passive check valves. Under the condition of a fixed total number of passive check valves, by means of changing the inlet valves and outlet valves’ configuration, the pumping characteristics in terms of flow rate and backpressure are experimentally investigated. Like the maximum flow rate and backpressure, the testing results show that the optimal frequencies are significantly affected by changes in the number inlet valves and outlet valves. The variation ratios of the maximum flow rate and the maximum backpressure are up to 66% and less than 20%, respectively. Furthermore, the piezoelectric pump generally demonstrates very similar flow rate and backpressure characteristics when the number of inlet valves in one kind of configuration is the same as that of outlet valves in another configuration. The comparison indicates that the backflow from the pumping chamber to inlet is basically the same as the backflow from the outlet to the pumping chamber. No matter whether the number of inlet valves or the number of outlet valves is increased, the backflow can be effectively reduced. In addition, the backpressure fluctuation can be significantly suppressed with an increase of either inlet valves or outlet valves. It also means that the pump can prevent the backflow more effectively at the cost of power consumption. The pump is very suitable for conditions where more accurate flow rates are needed and wear and fatigue of check valves often occur.

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“…Various micropumps have been developed in recent decade [1][2][3][4]. According to actuation principles, micropumps can be categorized into several types [1], such as electrostatic [5], piezoelectric [6,[11][12][13][14][15][16][17][18], thermopneumatic [7], electromagnetic [8], magnetohydrodynamic [9], and shape memory alloy [10]. Among these, piezoelectric micropump is the most typical one and has notable advantages of simple structure, large power density, and no magnetic influence [11][12][13].…”

Section: Introductionmentioning

confidence: 99%

“…Most piezoelectric diaphragm micropumps utilize a piezoelectric plate (or disk) directly glued on the pump diaphragm [14][15][16] and work at the quasi-static state. Thus, both the working frequency and the volume change of the micropump induced by the deflection of pump diaphragm are small.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric micropump using dual-frequency drive

Pan

Huang

et al. 2015

Sensors and Actuators A: Physical

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A piezoelectric micropump with an integrated sensor based on space-division multiplexing

Cited by 50 publications

References 22 publications

Performance Comparison of Novel Single and Bi-Diaphragm PZT Based Valveless Micropumps

Performance Comparison of Novel Single and Bi-Diaphragm PZT Based Valveless Micropumps

Development and Characterization a Single-Active-Chamber Piezoelectric Membrane Pump with Multiple Passive Check Valves

Piezoelectric micropump using dual-frequency drive

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