An effective method for efficient power extraction from planar waveguide or thin slab solid-state lasers is provided by the hybrid configuration, which combines an unstable lateral resonator with a stable or waveguide resonator in the transverse direction. A two-mirror configuration is preferred for ease of alignment and simplicity and previously we have used spherical optics [1], but transverse mode selection has relied on the use of an intracavity slit. More general 2-mirror resonators require at least one toroidal mirror surface, with large curvature (R L ~ 0.2m to >1m) in the lateral direction and small curvature (R T ~ 15 to 50mm) in the transverse direction. For a large core height planar waveguide as in [1], R T and the mirror distance can be chosen to obtain mode selectivity by low-loss coupling of the fundamental mode into the core, combined with spread of higher order modes into the cladding. However, additional selectivity may be available if the transverse size of the toroidal mirror is restricted to form a slit-shaped mirror. Such mirrors are difficult to fabricate by conventional means.We have developed two new fabrication methods for highly curved toroidal laser resonator mirrors based on laser micromachining of cylindrical substrates that already have the large lateral curvature R T provided by conventional polishing. These mirrors are produced by a two-step CO 2 laser machining process with high resolution ablative laser cutting [2] and then laser polishing [3], or by vaporization of silica in the CO 2 laser smoothing process at higher than usual power. We have produced mirrors with R T = 32mm and 15mm radius of curvature and 14 mm lateral length for use with the 200µm core height Nd:YAG [1] and a 150µm core Yb:YAG planar waveguide laser respectively. -1.2 -1.0 -0.8 -0.6 -0.4 -0.2 0.0 0.2 -0.3 -0.2 -0.1 0.0 0.1 0.2 0.3 Distance, mm Level, µm As fabricated Design curvature Curvature R=32mm a) Overall shape -1.2 -1.0 -0.8 -0.6 -0.4 -0.2 0.0 0.2 -0.3 -0.2 -0.1 0 0.1 0.2 0.3 Distance, mm Level, µm As fabricated Design curvature Curvature R=15mm b) Overall shapeFig. 1 Surface profile of Nd:YAG resonator mirror fabricated by the laser cutting and polishing process.Fig. 2 Surface profile of Yb:YAG resonator mirror made by vaporization in laser polishing process.The toroidal mirror for the Nd:YAG resonator has been generated by pulsed laser cutting of a silica substrate with R L = 240mm, using a 45µm beam diameter to generate overall cross-section inset in Fig.1. The central 290µm aperture matches the fundamental mode size, with surrounding rims of reverse curvature and grooves designed to disperse the higher order modes. The cut surface is laser polished in just the mirror area, using a scanned CW laser beam [2], reducing the mirror roughness to ±20nm in this area. Fig. 1 shows both the excellent match to the design curvature and the rapid mode-selecting cut-away at the design 290 µm width. In the alternative process aimed at better lateral smoothness, CW vaporization during smoothing at increased laser...