Photons Plus Ultrasound: Imaging and Sensing 2022 2022
DOI: 10.1117/12.2608934
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A PMUT based photoacoustic system as a microfluidic concentration detector

Abstract: We report on the development of a novel piezo-MEMS based optofluidic platform to detect the concentration of various species dissolved in a fluid. This platform employs piezoelectric micromachined ultrasound transducers (PMUTs) to work as a photoacoustic receiver, receiving ultrasound from fluid targets present in microfluidic channels while illuminated with a nanosecond pulsed laser. We fabricate both the PMUTs and the microfluidic channels and subsequently use them for the experiment. We also show the capabi… Show more

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Cited by 7 publications
(5 citation statements)
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“…Using PMUT-based ultrasonic sensor also can be used as a cost-effective sensor for imaging the coagulated lesion. 15,22,[24][25][26][27][28][29] Hence, this simulation study also shows the superiority of photoacoustic imaging as a non-invasive guiding tool for accurately monitoring the lesion area and thermal dose in the coagulated regions.…”
Section: Introductionmentioning
confidence: 63%
“…Using PMUT-based ultrasonic sensor also can be used as a cost-effective sensor for imaging the coagulated lesion. 15,22,[24][25][26][27][28][29] Hence, this simulation study also shows the superiority of photoacoustic imaging as a non-invasive guiding tool for accurately monitoring the lesion area and thermal dose in the coagulated regions.…”
Section: Introductionmentioning
confidence: 63%
“…MEMS finds applications in a broad range of areas, such as medical technology, [ 214 , 215 , 216 ] telecommunications, [ 217 ] consumer electronics, [ 218 ] and automotive systems. [ 219 ] Innovations like inertial measurement units [ 220 ] in smartphones, pressure sensors [ 221 ] in cars, micro‐mirrors [ 222 ] in projection systems, and MUTs [ 223 , 224 , 225 , 226 , 227 , 228 , 229 , 230 , 231 , 232 ] as fingerprint sensors/medical imaging systems all demonstrate the transformative power of MEMS technology.…”
Section: Progress In the Mof Applicationsmentioning
confidence: 99%
“…The sensing principle was based on the shift in resonant frequency of PMUT resulting from the variation of the sensor's effective mass while exposed to the target gas molecules. Roy et al [147] developed a PMUT-based optofluidic platform to measure the concentration of various species dissolved in a fluid. The PZT-based PMUT was used as photoacoustic receiver, which received ultrasonic signals from fluid targets present in microfluidic channels while illuminated with a nanosecond pulsed laser.…”
Section: Chemical and Bio-sensingmentioning
confidence: 99%