A Polysilicon Flow Sensor For Gas Flowmeters

Neda, Tokudai; Nakamura, Kazuo; Takumi, Tsugihiko

doi:10.1109/sensor.1995.717282

Cited by 19 publications

(3 citation statements)

References 8 publications

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“…Controlling fluid flow also requires sensing it. Micromachined flow sensors have also been developed and could see use in sensing various automotive fluid-flow rates and directions [7], [66]. Microsensors capable of detecting different gases have also been developed [67]- [69] and could find themselves in vehicles.…”

Section: Commercial Automotive Micromachined Devicesmentioning

confidence: 99%

Application of MEMS technology in automotive sensors and actuators

1998

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The design of sensors and actuators has increasingly made use of microelectromechanical systems (MEMS) technology. This technology is well suited to producing a class of micromachined sensors and actuators that combines signal processing and communications on a single silicon chip or contained within the same package. This paper contains a discussion of the issues in producing MEMS sensors and actuators from the concept selection stage to the manufacturing platform. Examples of commercial and emerging automotive sensors and actuators are given, which illustrate the various aspects of device development. Future trends in MEMS technology as applied to automotive components are also discussed.

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Section: Commercial Automotive Micromachined Devicesmentioning

confidence: 99%

Application of MEMS technology in automotive sensors and actuators

1998

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“…While this practice is suitable for providing electrical insulation, however, it increases power consumption and deteriorates the thermal time response (Neda et al 1995) of the microhotplate. This is because when an insulation layer is blanket deposited over the membrane, it increases the overall membrane thermal conductivity.…”

Section: Introductionmentioning

confidence: 99%

Performance improvement of square microhotplate with insulation layer and heater geometry

Saxena

Paily

2014

Microsyst Technol

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“…Recently, a one-wire type thermal flow sensor with wide measurement range and quick response was fabricated through CMOS technology and silicon micromachining by Neda et al [8] , which can be applied to gas flow measurement in household gas flowmeters, oscillation detection of fluidics and other systems. Mailly et al [9] presented the design, manufacture stages, characteristic and thermal model of a micro thermal sensor for gas flow measurement.…”

Section: Introductionmentioning

confidence: 99%

A hot platinum thin film anemometer

Liu

Luo

Zhang

et al. 2010

2010 11th International Conference on Electronic Packaging Technology &Amp; High Density Packaging

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In this paper, a platinum thin film thermal flow sensor was presented. Design, fabrication process and thermal analysis were presented and discussed. Compared with traditional structure of four supporting beams, the present structure can provide high sensitivity and good strength because of the unique thermal and mechanical design. The sizes of the flow sensor chip are 571 μ m × 280 μ m × 0.25 μ m. The experimental results show that this flow sensor is capable of measuring the flow rate and has a good linearity in the flowmeter capacity (0.1 to1 m 3 /h) and also the linearity of the sensor is less influenced by the resistance of the sensor and flow orientation at a constant input voltage. The sensors subjected to different voltage input have been tested and the results show that the sensor has better performance under 3V voltage input. It demonstrates that the micro-machined flow sensor has great potential to be used in detecting flow rates within 0.1 to1 m 3 /h.

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A Polysilicon Flow Sensor For Gas Flowmeters

Cited by 19 publications

References 8 publications

Application of MEMS technology in automotive sensors and actuators

Application of MEMS technology in automotive sensors and actuators

Performance improvement of square microhotplate with insulation layer and heater geometry

A hot platinum thin film anemometer

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