Application of MEMS technology in automotive sensors and actuators

Eddy, David S.; Sparks, D.

doi:10.1109/5.704280

Cited by 189 publications

(78 citation statements)

References 49 publications

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“…The principle advantages of capacitive pressure sensors over piezoresistive pressure sensors are lower power consumption, increased pressure sensitivity, and lower temperature cross-sensitivity (Lee and Wise, 1982;Eaton and Smith, 1997;Eddy and Sparks, 1998;Bever et al, 2003;Beeby et al, 2004). In addition, because there is no need to mount any resistors on the sensor diaphragm, scaling down the device dimensions is easier because concerns about stress averaging and resistor tolerance are eliminated.…”

Section: Capacitive Pressure Sensorsmentioning

confidence: 99%

A micro-capacitive pressure sensor design and modelling

Kubba

Hasson

Kubba

et al. 2016

J. Sens. Sens. Syst.

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Abstract. Measuring air pressure using a capacitive pressure sensor is a robust and precise technique. In addition, a system that employs such transducers lies within the low power consumption applications such as wireless sensor nodes. In this article a high sensitivity with an elliptical diaphragm capacitive pressure sensor is proposed. This design was compared with a circular diaphragm in terms of thermal stresses and pressure and temperature sensitivity. The proposed sensor is targeted for tyre pressure monitoring system application. Altering the overlapping area between the capacitor plates by decreasing the effective capacitance area to improve the overall sensitivity of the sensor ( C/C), temperature sensitivity, and built-up stresses is also examined in this article. Theoretical analysis and finite element analysis (FEA) were employed to study pressure and temperature effects on the behaviour of the proposed capacitive pressure sensor. A MEMS (micro electro-mechanical systems) manufacturing processing plan for the proposed capacitive sensor is presented. An extra-low power short-range wireless read-out circuit suited for energy harvesting purposes is presented in this article. The developed read-out circuitry was tested in terms of sensitivity and transmission range.

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Section: Capacitive Pressure Sensorsmentioning

confidence: 99%

A micro-capacitive pressure sensor design and modelling

Kubba

Hasson

Kubba

et al. 2016

J. Sens. Sens. Syst.

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“…Although other RF MEMS switch efforts have produced excellent results on high resistivity silicon or quartz substrates [1,2], these switches cannot be monolithically integrated with active microwave electronics, such as tuning circuits in amplifiers and filters. The intent of this research was to investigate the effect of material systems on the performance of the switches operating over the frequency range of 1 -26 GHz, and in particular X-band (8)(9)(10)(11)(12).…”

Section: Chapter 4 Fabrication Processmentioning

confidence: 99%

“…The development of MicroElectroMechanical Systems (MEMS) using silicon microfabrication processes has created numerous applications for sensors and actuators such as pressure sensors, accelerometers, flow controllers, and chemical analysis systems [1,2]. MEMS technology has also been investigated for high frequency circuits such as tunable filters and switches for routing radio frequency (RF) and microwave frequency signals [3,4].…”

Section: Introductionmentioning

confidence: 99%

Microelectromagnetic Systems (MEMS) Electrostatic Switching Technology for Microwave Systems

Strawser¹

2000

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Public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, searching existing data sources, gathering and maintaining the data needed, and completing and reviewing this collection of information Send comments regarding this burden estimate or any other aspect of this collection of information, including suggestions for reducing this burden to Washington Headquarters Services, Directorate AFRL-SN-WP-TR-2001 -1060 SUPPLEMENTARY NOTESThis final report is a Ph.D. dissertation submitted to the University of Cincinnati in partial fulfillment of its requirements for a Doctor of Philosophy degree. 12a. DISTRIBUTION / AVAILABILITY STATEMENTApproved for public release; distribution unlimited. 12b. DISTRIBUTION CODE ABSTRACT (Maximum 200 Words)The development of microelectromechanical Systems (MEMS) switch technology and integration of this technology into radio frequency (RF) electronics has created numerous applications for both commercial and military systems. The incorporation of RF MEMS switches into microwave systems offers unprecedented reductions in insertion loss (on-resistance) with extremely low switching power levels as compared with active devices such as field effect transistors (FETs) and positive-intrinsic-negative (PIN) diodes. Achievement of these performance improvements creates new opportunities for radar systems. The overall objective of this research was the design, fabrication, and characterization of MEMS switches fabricated on gallium arsenide substrates with possible application into microwave systems.

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“…A industria automobilística é uma grande consumidora de sensores e representa um mercado crescente, (BANNATYNE, 2000;EDDY;SPARKS, 1998;FLEMING, 2001;VENKATESH, 2007). Alguns exemplos são os sensores das bolsas infláveis (air-bags), sensor de oxigênio do escapamento, sensores de pressão e sensores de temperatura, etc.…”

Section: Introductionunclassified

“…Assim, o desenvolvimento de sensores depende cada vez mais da tecnologia de Sistemas Micro-eletro-mecânicos (microelectromechanical systems, MEMS). A tecnologia MEMS permite que sensores e atuadores sejam microfabricados de maneira a combinar processamento de sinal e comunicação em um único chip ou encapsulamento (EDDY;SPARKS, 1998).…”

Section: Introductionunclassified

Micro-sensor capacitivo para avaliação da qualidade de combustíveis automotivos.

Mendonça¹

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Application of MEMS technology in automotive sensors and actuators

Cited by 189 publications

References 49 publications

A micro-capacitive pressure sensor design and modelling

A micro-capacitive pressure sensor design and modelling

Microelectromagnetic Systems (MEMS) Electrostatic Switching Technology for Microwave Systems

Micro-sensor capacitivo para avaliação da qualidade de combustíveis automotivos.

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