A portable scanning electron microscope column design based on the use of permanent magnets

Khursheed, Anjam; Phang, J.C.H.; Thong, James Y.L.

doi:10.1002/sca.1998.4950200204

Cited by 10 publications

(2 citation statements)

References 9 publications

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“…The electrons are focused onto a target using a permanent neodymium-iron-boron magnet assembly. The design of the magnet is loosely based on a proposed design for a portable scanning electron microscopy system [11]. The final design was developed using FEA, as shown in figure 4.…”

Section: Methodsmentioning

confidence: 99%

A Variable-Energy Soft X-Ray Microprobe to Investigate Mechanisms of the Radiation-Induced Bystander Effect.

Folkard¹,

Vojnovic²,

Schettino³

et al. 2007

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Section: Methodsmentioning

confidence: 99%

A Variable-Energy Soft X-Ray Microprobe to Investigate Mechanisms of the Radiation-Induced Bystander Effect.

Folkard¹,

Vojnovic²,

Schettino³

et al. 2007

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“…Recent proposals to miniaturise scanning electron microscope (SEM) columns through the use of permanent magnets involve the design of compact high-resolution electron lenses (Khursheed 2000, Khursheed et al 1998. The work reported here modifies some of these lens designs so that they can be used as add-on SEM attachments.…”

Section: Introductionmentioning

confidence: 99%

A high‐resolution add‐on in‐lens attachment for scanning electron microscopes

2001

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Summary:A compact add-on objective lens for the scanning electron microscope (SEM) has been designed and tested. The lens is < 35 mm high and can be fitted on to the specimen stage as an easy-to-use attachment. Initial results show that it typically improves the spatial resolution of the SEM by a factor of three. The add-on unit is based upon a permanent magnet immersion lens design. Apart from the extra attachment to the specimen stage, the SEM with the add-on lens functions in the normal way. The in-lens unit can comfortably accommodate specimen heights up to 10 mm. The new add-on lens unit opens up the possibility of operating existing SEMs in the high-resolution in-lens mode. By using a deflector at the top of the add-on lens unit, it can also operate as a quantitative multichannel voltage contrast spectrometer, capable of recording the energy spectrum of the emitted secondary electrons. Initial experiments confirm that a significant amount of voltage contrast can be obtained.

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