2010
DOI: 10.1115/1.4001582
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A Quasi-Static Mechanics Analysis of Three-Dimensional Nanoscale Surface Polishing

Abstract: A quasi-static mechanics analysis of nanoscale surface polishing that provides insight into the surface topography evolution and the removal of material at the asperity level is presented. The analysis is based on a three-dimensional stochastic model that accounts for multiscale (fractal) surface roughness and elastic, elastic-plastic, and fully plastic asperity deformation by hard abrasive nanoparticles embedded in the soft surface layer of a rigid polishing plate. Numerical results of the steady-state roughn… Show more

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Cited by 3 publications
(2 citation statements)
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“…Thus, the breakdown of continuum mechanics can be understood in terms of the multirough nature of the contact, and the asperity theory of friction can be applied to the nanoscale. Komvopoulos [20] et al, investigated the multiscale (fractal) surface roughness and the elastoplasticity and elasticity of hard abrasive nanoparticles embedded in a soft surface layer of a rigid polishing plate for nanoscale surface polishing by using a 3D stochastic model and a quasi-static mechanical analysis method. The influence of the embedding process on the surface morphology, roughness and grinding rate of the material was analyzed.…”
Section: Resultsmentioning
confidence: 99%
“…Thus, the breakdown of continuum mechanics can be understood in terms of the multirough nature of the contact, and the asperity theory of friction can be applied to the nanoscale. Komvopoulos [20] et al, investigated the multiscale (fractal) surface roughness and the elastoplasticity and elasticity of hard abrasive nanoparticles embedded in a soft surface layer of a rigid polishing plate for nanoscale surface polishing by using a 3D stochastic model and a quasi-static mechanical analysis method. The influence of the embedding process on the surface morphology, roughness and grinding rate of the material was analyzed.…”
Section: Resultsmentioning
confidence: 99%
“…optimization [8,9], polishing mechanics [10,11], as well as methods include finite element methods (FEM) [12], molecular dynamics (MD) approach [13], quasic-static model [14], fluid dynamic when analyzing the slurries and probability statistics [15,16]. Most of the previous research has focused on the reduction of surface roughness and figuring of aspheric and freeform surfaces [17], and some preliminary work has also been done for structured surface generation by bonnet polishing [18].…”
Section: Introductionmentioning
confidence: 99%